A-ELMT-XY ELMT-XY-100X100

A-ELMT-XY ELMT-XY-100X100

Supplier
Nano-stage
Part Number
ELMT-XY-100X100
Category
Motorized Stages
Origin
China

The A-ELMT-XY series linear motor stage combines crossed-roller guides with a linear motor and a large central opening. Its straightness and flatness surpass conventional mechanical guides. It is particularly suitable for small-step or ultraprecise positioning and is an excellent choice for precision optical adjustment, assembly and machining. It provides excellent motion performance in microscopy.

Specification Snapshot
Repeatability
±0.3 um
Positioning Accuracy
±1 um
Straightness
1um
Maximum Speed
500mm/s
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Overview

The A-ELMT-XY series linear motor stage combines crossed-roller guides with a linear motor and a large central opening. Its straightness and flatness surpass conventional mechanical guides. It is particularly suitable for small-step or ultraprecise positioning and is an excellent choice for precision optical adjustment, assembly and machining. It provides excellent motion performance in microscopy.

Specifications

ParameterValue
Motor typeThree-Phase Ironless Motor
Grating resolution50nm Absolute or sin\cos 4.88nm (Other Higher Resolutions Optional)
Motor ThrustContinuous 11.5N/Peak 46N
Minimum Step Size [Incremental Grating with Resolution of 5nm or Finer, Paired with nanopwm or Linear Driver]10nm
Travel100 mm × 100 mm
Open-Aperture Dimensions105 mm × 105 mm
Repeatability±0.3 um
Positioning Accuracy±1 um
Flatness6um
Straightness1um
Maximum Speed500mm/s
Maximum load8kg

Key Features

Linear Guides Have Excellent Flatness and Straightness; Iron-Core Linear Motor Ensures System Rigidity and Dynamic Performance; Quiet, Smooth Operation with Extremely Low Noise and Very High Precision.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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A-ELMT-XY ELMT-XY-100X100
Nano-stage · Motorized Stages
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