A-ABT-XY-360*360
A-ABT-XY-360*360 combines marble structure, linear motors and air bearings for high accuracy, straightness and flatness. It suits tiny-step/ultraprecise positioning, optical alignment, assembly, machining and semiconductor microscopy inspection. A higher-precision ceramic version uses high-purity alumina air-bearing structures/guides. Compared with granite/metal, alumina offers lower expansion and improved straightness, hardness and wear resistance.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motor type | Three-Phase Ironless Motor |
| Grating resolution | sin\cos 4.88nm (Other Higher Resolutions Optional) |
| Upper-Axis Motor Thrust | Continuous 90N, Peak 315N |
| Lower-Axis Motor Thrust | Continuous 219N*2, Peak 750N*2 |
| Upper-Axis No-Load Acceleration [source first occurrence] | 4.5G |
| Upper-Axis No-Load Acceleration [source second occurrence] | 3G |
| Minimum Step Size [With nanopwm or Linear Driver] | 10nm |
| Travel | 360 mm × 360 mm |
| Maximum Speed | 500mm/s |
| Maximum load | 50kg |
| Repeatability [Standard Version] | ±0.15 um |
| Positioning Accuracy [Standard Version] | ±0.5 um |
| Flatness [Standard Version] | ±1 um |
| Straightness [Standard Version] | 1.5 um |
| Repeatability [Ceramic Version] | ±0.1 um |
| Positioning Accuracy [Ceramic Version] | ±0.3 um |
| Flatness [Ceramic Version] | ±0.5 um |
| Straightness [Ceramic Version] | 1 um |
Key Features
Datasheet
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Supplier Information
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