FSM Voice-Coil Fast Steering Mirror
Noncontact Two-Dimensional Angular Measurement with Voice-Coil Drive; Fast Two-Dimensional Motion, Load Capacity and Larger Reflection Angles; Compatible with Extreme Environments and 1-Inch and 2-Inch Mirrors.
Specification Snapshot
Repeatability
2μrad
Angular Resolution
≤2μrad
Dimensions [Custom]
No Greater Than 70mm*70mm*50mm (Custom)
Operating Temperature
-20~+40
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Overview
Noncontact Two-Dimensional Angular Measurement with Voice-Coil Drive; Fast Two-Dimensional Motion, Load Capacity and Larger Reflection Angles; Compatible with Extreme Environments and 1-Inch and 2-Inch Mirrors.
Specifications
| Parameter | Value |
|---|---|
| Mirror Surface Dimensions | ≤60mm Diameter |
| Mirror Thickness | 10mm, Quartz |
| Rotation Angle Range | ±1.5° |
| Repeatability | 2μrad |
| Angular Resolution | ≤2μrad |
| Bandwidth [@±1°; @±0.25mrad (2-Inch Lens); (-3dB)@1mrad (1-Inch Lens)] | 10Hz @±1°, 100Hz @±0.25mrad (2-Inch Mirror), 650Hz (-3dB) @1mrad (1-Inch Mirror) |
| Dimensions [Custom] | No Greater Than 70mm*70mm*50mm (Custom) |
| Communication Interface | rs422 or usb Port |
| Operating Temperature | -20~+40 |
| Input Signal | Analog: ±10V; Digital Signal |
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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