FSM Voice-Coil Fast Steering Mirror

FSM Voice-Coil Fast Steering Mirror

Supplier
Nano-stage
Category
Positioner
Origin
China

Noncontact Two-Dimensional Angular Measurement with Voice-Coil Drive; Fast Two-Dimensional Motion, Load Capacity and Larger Reflection Angles; Compatible with Extreme Environments and 1-Inch and 2-Inch Mirrors.

Specification Snapshot
Repeatability
2μrad
Angular Resolution
≤2μrad
Dimensions [Custom]
No Greater Than 70mm*70mm*50mm (Custom)
Operating Temperature
-20~+40
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Overview

Noncontact Two-Dimensional Angular Measurement with Voice-Coil Drive; Fast Two-Dimensional Motion, Load Capacity and Larger Reflection Angles; Compatible with Extreme Environments and 1-Inch and 2-Inch Mirrors.

Specifications

ParameterValue
Mirror Surface Dimensions≤60mm Diameter
Mirror Thickness10mm, Quartz
Rotation Angle Range±1.5°
Repeatability2μrad
Angular Resolution≤2μrad
Bandwidth [@±1°; @±0.25mrad (2-Inch Lens); (-3dB)@1mrad (1-Inch Lens)]10Hz @±1°, 100Hz @±0.25mrad (2-Inch Mirror), 650Hz (-3dB) @1mrad (1-Inch Mirror)
Dimensions [Custom]No Greater Than 70mm*70mm*50mm (Custom)
Communication Interfacers422 or usb Port
Operating Temperature-20~+40
Input SignalAnalog: ±10V; Digital Signal

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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