VART Air Bearing Rotary Stage VART200

VART Air Bearing Rotary Stage VART200

Supplier
Nano-stage
Part Number
VART200
Category
Positioner
Origin
China

VAR series air-bearing rotary stages offer ultrahigh rotational accuracy, stable constant-speed operation, extremely low axial and radial runout, and high rigidity. They result from continuous optimization using the development team's expertise in materials, structures and simulation analysis. Noncontact air bearings enable frictionless rotation, allowing VAR stages to achieve submicron angular accuracy.

Specification Snapshot
Width
200 mm
Height
165 mm
Max Speed
800 rpm
Accuracy
±2 arc sec
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Overview

VAR series air-bearing rotary stages offer ultrahigh rotational accuracy, stable constant-speed operation, extremely low axial and radial runout, and high rigidity. They result from continuous optimization using the development team's expertise in materials, structures and simulation analysis. Noncontact air bearings enable frictionless rotation, allowing VAR stages to achieve submicron angular accuracy.

Specifications

ParameterValue
Width200 mm
Tabletop Diameter145 mm
Height165 mm
Aperture30 mm
Total Travel360° Continuous
Bus VoltageUp to 320VDC
Fundamental Encoder Resolution18000 lines/rev
Max Speed800 rpm
Accuracy±2 arc sec
Repeatability (Bi-Directional)<1 arc sec
Max Load [Axial]40 kg
Max Load [Radial]6 kg
Max Load [Tilt]8 N-m
Axial Error Motion [first Error Motion group in source table;no further qualifier given]<100nm
Radial Error Motion [first Error Motion group in source table;no further qualifier given]<150nm
Tilt Error Motion [first Error Motion group in source table;no further qualifier given]<5.0 arc sec
Axial Error Motion [second Error Motion group in source table;no further qualifier given]<20nm
Radial Error Motion [second Error Motion group in source table;no further qualifier given]<20nm
Tilt Error Motion [second Error Motion group in source table;no further qualifier given]<0.04 arc-sec
Operating Pressure0.5 MPa ±0.05 MPa
Air Consumption<2 SCFM
Inertia [Unloaded;source unit breaks across kg-m/m or kg-/mm and contains a displaced 2 marker;unit not inferred]13600
Total Mass14.5 kg
MaterialBlack Aluminum Body

Key Features

Air-Bearing Rotary Table; Direct-Drive Brushless Slotless Servo Motor with High Torque; Outstanding Speed Stability and Motion Performance, Low Motion Error and High Stable Accuracy; High-Precision Rotary Encoder; Large Clear Aperture; No Mechanical Contact.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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VART Air Bearing Rotary Stage VART200
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