VART Air Bearing Rotary Stage VART150
VAR series air-bearing rotary stages offer ultrahigh rotational accuracy, stable constant-speed operation, extremely low axial and radial runout, and high rigidity. They result from continuous optimization using the development team's expertise in materials, structures and simulation analysis. Noncontact air bearings enable frictionless rotation, allowing VAR stages to achieve submicron angular accuracy.
Specification Snapshot
Width
150 mm
Height
135 mm
Max Speed
1200 rpm
Accuracy
±2 arc sec
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Overview
VAR series air-bearing rotary stages offer ultrahigh rotational accuracy, stable constant-speed operation, extremely low axial and radial runout, and high rigidity. They result from continuous optimization using the development team's expertise in materials, structures and simulation analysis. Noncontact air bearings enable frictionless rotation, allowing VAR stages to achieve submicron angular accuracy.
Specifications
| Parameter | Value |
|---|---|
| Width | 150 mm |
| Tabletop Diameter | 100 mm |
| Height | 135 mm |
| Aperture | 20 mm |
| Total Travel | 360° Continuous |
| Bus Voltage | Up to 320VDC |
| Fundamental Encoder Resolution | 11840 lines/rev |
| Max Speed | 1200 rpm |
| Accuracy | ±2 arc sec |
| Repeatability (Bi-Directional) | <1 arc sec |
| Max Load [Axial] | 20 kg |
| Max Load [Radial] | 3 kg |
| Max Load [Tilt] | 3.5 N-m |
| Axial Error Motion [first Error Motion group in source table;no further qualifier given] | <100nm |
| Radial Error Motion [first Error Motion group in source table;no further qualifier given] | <150nm |
| Tilt Error Motion [first Error Motion group in source table;no further qualifier given] | <5.0 arc sec |
| Axial Error Motion [second Error Motion group in source table;no further qualifier given] | <20nm |
| Radial Error Motion [second Error Motion group in source table;no further qualifier given] | <20nm |
| Tilt Error Motion [second Error Motion group in source table;no further qualifier given] | <0.04 arc-sec |
| Operating Pressure | 0.5 MPa ±0.05 MPa |
| Air Consumption | <2 SCFM |
| Inertia [Unloaded;source unit breaks across kg-m/m or kg-/mm and contains a displaced 2 marker;unit not inferred] | 2200 |
| Total Mass | 6.5 kg |
| Material | Black Aluminum Body |
Key Features
Air-Bearing Rotary Table; Direct-Drive Brushless Slotless Servo Motor with High Torque; Outstanding Speed Stability and Motion Performance, Low Motion Error and High Stable Accuracy; High-Precision Rotary Encoder; Large Clear Aperture; No Mechanical Contact.
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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