SPM3 Nanopositioning Stage
SPM3 is a three-axis ultrafast nanopositioner with 75µm X/Y travel and natural frequencies above 2kHz on both axes. SPM3's Z section offers 50µm travel and market-leading speed, with maximum natural frequency 12.5kHz. With high-power controllers, SPM3.5 achieves Z step responses below one millisecond. SPM stages suit demanding AFM metrology and combine with coarse microstages; see hybrid systems. Part of our high-speed line, with high-power controllers available.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Range of motion [XY configuration；source column SPM3.30.xx] | 30 µm |
| Resolution [XY configuration；source column SPM3.30.xx] | 0.03 nm |
| Noise floor [XY configuration；source column SPM3.30.xx] | typical:0.003 nm |
| Repeatability [XY configuration；source column SPM3.30.xx] | 0.06 nm |
| Linearization [XY configuration；source column SPM3.30.xx] | typical:0.02% |
| Resonant frequency XY [XY configuration；source column SPM3.30.xx] | 3000/2000 |
| Stiffness XY [XY configuration；source column SPM3.30.xx] | 4/3 |
| Range of motion [XY configuration；source column SPM3.50.xx] | 50 µm |
| Resolution [XY configuration；source column SPM3.50.xx] | 0.05 nm |
| Noise floor [XY configuration；source column SPM3.50.xx] | typical:0.005 nm |
| Repeatability [XY configuration；source column SPM3.50.xx] | 0.1 nm |
| Linearization [XY configuration；source column SPM3.50.xx] | typical:0.02% |
| Resonant frequency XY [XY configuration；source column SPM3.50.xx] | 3000/2000 |
| Stiffness XY [XY configuration；source column SPM3.50.xx] | 4/3 |
| Range of motion [XY configuration；source column SPM3.75.xx] | 75 µm |
| Resolution [XY configuration；source column SPM3.75.xx] | 0.075 nm |
| Noise floor [XY configuration；source column SPM3.75.xx] | typical:0.0075 nm |
| Repeatability [XY configuration；source column SPM3.75.xx] | 0.15 nm |
| Linearization [XY configuration；source column SPM3.75.xx] | typical:0.02% |
| Resonant frequency XY [XY configuration；source column SPM3.75.xx] | 3000/2000 |
| Stiffness XY [XY configuration；source column SPM3.75.xx] | 4/3 |
| Size W x L x H [XY configuration] | 121 x 121 x (depends on Z axis range of motion) |
| Range of motion [Z configuration；source column SPM3.xx.05] | 5 µm |
| Resolution [Z configuration；source column SPM3.xx.05] | 0.005 nm |
| Typical noise floor [Z configuration；source column SPM3.xx.05] | 0.0005 nm |
| Repeatability [Z configuration；source column SPM3.xx.05] | 0.01 nm |
| Linearization [Z configuration；source column SPM3.xx.05] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3.xx.05] | 12500 Hz |
| Stiffness [Z configuration；source column SPM3.xx.05] | 40 N/µm |
| Size W x L x H [Z configuration；source column SPM3.xx.05] | 121 x 121 x 33.7 |
| Range of motion [Z configuration；source column SPM3.xx.10] | 10 µm |
| Resolution [Z configuration；source column SPM3.xx.10] | 0.01 nm |
| Typical noise floor [Z configuration；source column SPM3.xx.10] | 0.001 nm |
| Repeatability [Z configuration；source column SPM3.xx.10] | 0.02 nm |
| Linearization [Z configuration；source column SPM3.xx.10] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3.xx.10] | 5500 Hz |
| Stiffness [Z configuration；source column SPM3.xx.10] | 7.5 N/µm |
| Size W x L x H [Z configuration；source column SPM3.xx.10] | 121 x 121 x 49.7 |
| Range of motion [Z configuration；source column SPM3.xx.25] | 25 µm |
| Resolution [Z configuration；source column SPM3.xx.25] | 0.025 nm |
| Typical noise floor [Z configuration；source column SPM3.xx.25] | 0.0025 nm |
| Repeatability [Z configuration；source column SPM3.xx.25] | 0.05 nm |
| Linearization [Z configuration；source column SPM3.xx.25] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3.xx.25] | 5500 Hz |
| Stiffness [Z configuration；source column SPM3.xx.25] | 7.5 N/µm |
| Size W x L x H [Z configuration；source column SPM3.xx.25] | 121 x 121 x 49.7 |
| Range of motion [Z configuration；source column SPM3.xx.50] | 50 µm |
| Resolution [Z configuration；source column SPM3.xx.50] | 0.05 nm |
| Typical noise floor [Z configuration；source column SPM3.xx.50] | 0.005 nm |
| Repeatability [Z configuration；source column SPM3.xx.50] | 0.1 nm |
| Linearization [Z configuration；source column SPM3.xx.50] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3.xx.50] | 3500 Hz |
| Stiffness [Z configuration；source column SPM3.xx.50] | 2.7 N/µm |
| Size W x L x H [Z configuration；source column SPM3.xx.50] | 121 x 121 x 69.7 |
| Sensor [General specifications] | Silicon HR Sensor |
| Material [General specifications] | Aluminium |
| Cable length [General specifications] | 2 m |
| Controller [General specifications] | High Speed |
| Maximum load* [Horizontal use；General specifications] | 0.1 kg |
| Maximum load* [Vertical use；General specifications] | 0.01 kg |
Datasheet
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