SPM3LR Nanopositioning Stage
SPM3LR is a three-axis nanopositioner with 100,200 or 300µm X/Y travel. SPM3LR's Z section offers 50µm travel and market-leading speed with maximum resonance 12.5kHz. SPM3LR.xxx.05 can achieve Z step responses below one millisecond. SPM3LR suits demanding metrology such as AFM and can combine with coarse microstages; see hybrid systems.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Range of motion [XY configuration；source column SPM3LR.100.xx] | 100 µm |
| Resolution [XY configuration；source column SPM3LR.100.xx] | 0.1 nm |
| Noise floor [XY configuration；source column SPM3LR.100.xx] | typical:0.01 nm |
| Repeatability [XY configuration；source column SPM3LR.100.xx] | 0.2 nm |
| Linearization [XY configuration；source column SPM3LR.100.xx] | typical:0.02% |
| Resonant frequency XY [XY configuration；source column SPM3LR.100.xx] | 500/300 |
| Stiffness XY [XY configuration；source column SPM3LR.100.xx] | 0.6/0.35 |
| Range of motion [XY configuration；source column SPM3LR.200.xx] | 200 µm |
| Resolution [XY configuration；source column SPM3LR.200.xx] | 0.2 nm |
| Noise floor [XY configuration；source column SPM3LR.200.xx] | typical:0.02 nm |
| Repeatability [XY configuration；source column SPM3LR.200.xx] | 0.4 nm |
| Linearization [XY configuration；source column SPM3LR.200.xx] | typical:0.02% |
| Resonant frequency XY [XY configuration；source column SPM3LR.200.xx] | 350/200 |
| Stiffness XY [XY configuration；source column SPM3LR.200.xx] | 0.5/0.3 |
| Range of motion [XY configuration；source column SPM3LR.300.xx] | 300 µm |
| Resolution [XY configuration；source column SPM3LR.300.xx] | 0.3 nm |
| Noise floor [XY configuration；source column SPM3LR.300.xx] | typical:0.03 nm |
| Repeatability [XY configuration；source column SPM3LR.300.xx] | 0.6 nm |
| Linearization [XY configuration；source column SPM3LR.300.xx] | typical:0.02% |
| Resonant frequency XY [XY configuration；source column SPM3LR.300.xx] | 250/150 |
| Stiffness XY [XY configuration；source column SPM3LR.300.xx] | 0.4/0.25 |
| Size W x L x H [XY configuration] | 121 x 121 x (depends on Z axis range of motion) |
| Range of motion [Z configuration；source column SPM3LR.xx.05] | 5 µm |
| Resolution [Z configuration；source column SPM3LR.xx.05] | 0.005 nm |
| Typical noise floor [Z configuration；source column SPM3LR.xx.05] | 0.0005 nm |
| Repeatability [Z configuration；source column SPM3LR.xx.05] | 0.01 nm |
| Linearization [Z configuration；source column SPM3LR.xx.05] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3LR.xx.05] | 12500 Hz |
| Stiffness [Z configuration；source column SPM3LR.xx.05] | 40 N/µm |
| Size W x L x H [Z configuration；source column SPM3LR.xx.05] | 121 x 121 x 33.7 |
| Range of motion [Z configuration；source column SPM3LR.xx.10] | 10 µm |
| Resolution [Z configuration；source column SPM3LR.xx.10] | 0.01 nm |
| Typical noise floor [Z configuration；source column SPM3LR.xx.10] | 0.001 nm |
| Repeatability [Z configuration；source column SPM3LR.xx.10] | 0.02 nm |
| Linearization [Z configuration；source column SPM3LR.xx.10] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3LR.xx.10] | 5500 Hz |
| Stiffness [Z configuration；source column SPM3LR.xx.10] | 7.5 N/µm |
| Size W x L x H [Z configuration；source column SPM3LR.xx.10] | 121 x 121 x 49.7 |
| Range of motion [Z configuration；source column SPM3LR.xx.25] | 25 µm |
| Resolution [Z configuration；source column SPM3LR.xx.25] | 0.025 nm |
| Typical noise floor [Z configuration；source column SPM3LR.xx.25] | 0.0025 nm |
| Repeatability [Z configuration；source column SPM3LR.xx.25] | 0.05 nm |
| Linearization [Z configuration；source column SPM3LR.xx.25] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3LR.xx.25] | 5500 Hz |
| Stiffness [Z configuration；source column SPM3LR.xx.25] | 7.5 N/µm |
| Size W x L x H [Z configuration；source column SPM3LR.xx.25] | 121 x 121 x 49.7 |
| Range of motion [Z configuration；source column SPM3LR.xx.50] | 50 µm |
| Resolution [Z configuration；source column SPM3LR.xx.50] | 0.05 nm |
| Typical noise floor [Z configuration；source column SPM3LR.xx.50] | 0.005 nm |
| Repeatability [Z configuration；source column SPM3LR.xx.50] | 0.1 nm |
| Linearization [Z configuration；source column SPM3LR.xx.50] | typical:0.02% |
| Resonant frequency [Z configuration；source column SPM3LR.xx.50] | 3500 Hz |
| Stiffness [Z configuration；source column SPM3LR.xx.50] | 2.7 N/µm |
| Size W x L x H [Z configuration；source column SPM3LR.xx.50] | 121 x 121 x 69.7 |
| Sensor [General specifications] | Silicon HR Sensor |
| Material [General specifications] | Aluminium |
| Cable length [General specifications] | 2 m |
| Controller [General specifications] | High Speed |
| Maximum load* [Horizontal use；General specifications] | 0.1 kg |
| Maximum load* [Vertical use；General specifications] | 0.01 kg |
Datasheet
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