SLR Nanopositioning Stage SLR.500
SLR piezo stages offer good travel-to-price value, with maximum travels from 100µm to 1500µm. FuseProtect makes the 800µm and 1500µm stages particularly reliable. Damage-tolerant actuator stacks keep applications operating after partial damage: damaged ceramic elements are electrically fused out while remaining elements continue. SLR800 and SLR1500 therefore have standard 5-year warranties.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Range of motion | 500 µm |
| Resolution | 0.5 nm |
| Noise floor | typical:0.05 nm |
| Repeatability | 1 nm |
| Linearization | typical:0.02% |
| Resonant frequency | 330 Hz |
| Stiffness | 0.16 N/µm |
| Sensor | Silicon HR Sensor |
| Size W x L x H | 60 mm × 60 mm × 15 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | Standard |
| Maximum load* [Horizontal use] | 1 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Datasheet
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Supplier Information
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