SLLV42 Piezoelectric Translation Stage
Specification Snapshot
scan range
> 3 µm
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Specifications
| Parameter | Value |
|---|---|
| blocking force F_B | > 5 N |
| max. normal force F_N | 30 N |
| max. lift force F_L | > 1.5 N |
| carriage dimension | 54.8 mm³ × 60 mm³ × 16 mm³ |
| weight of carriage | 148 g |
| weight of rail | 286 g / 100 mm |
| pitch torque M_P | 25 Nm |
| yaw torque M_Y | 25 Nm |
| roll torque M_R | 90 Nm |
| rail length | 70 .. 1480 mm |
| step width | 1 – 1,500 nm ¹ |
| scan range | > 3 µm |
| scan resolution | < 1 nm |
| velocity | > 20 mm/s |
| max. frequency | 18.5 kHz |
| sensor resolution [Closed-Loop with -S] | 1 nm |
| repeatability [Closed-Loop with -S] | ± 70 .. 450 nm ² |
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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