Specifications
| Parameter | Value |
|---|---|
| Travel Range X,Y,Z | ±16, ±17, ±6.5 |
| Travel Range θX,θY,θZ | ±10, ±10, ±21 |
| X,Y Minimum Displacement | 0.2 µm |
| Z Minimum Displacement | 0.08 µm |
| θX,θY Minimum Displacement | 2.5 µrad |
| θZ Minimum Displacement | 5 µrad |
| X,Y Backlash | 0.3 µm |
| Z Backlash | 0.06 µm |
| θX,θY Backlash | 2 µrad |
| θZ Backlash | 4 µrad |
| X,Y Positioning Repeatability | ±0.15 µm |
| Z Positioning Repeatability | ±0.06 µm |
| θX,θY Positioning Repeatability | ±2 µrad |
| θZ Positioning Repeatability | ±3 µrad |
| X,Y,Z Maximum Speed | 20 mm/s |
| θX,θY,θZ Maximum Speed | 500 mrad/s |
| X,Y,Z Typical Speed | 10 mm/s |
| θX,θY,θZ Typical Speed | 250 mrad/s |
| X Stiffness | 0.7 N/µm |
| Y Stiffness | 0.7 N/µm |
| Z Stiffness | 8 N/µm |
| Load [Baseplate Horizontal / Any Orientation] | 5/2.5 |
| Holding Force, Power Off [Baseplate Horizontal / Any Orientation] | 15/2.5 |
| Motor type | Permanent Magnet Synchronous Motor |
| Operating Temperature Range | 0~50 °C |
| Material | Stainless Steel, Aluminum |
| Mass | 2.2 Kg |
Datasheet
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Supplier Information
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