NPXY200Z10-269 Nanopositioning Stage
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Specifications
| Parameter | Value |
|---|---|
| Footprint | 140mm W x 140mm D x 30mm H |
| Aperture | 68mm W x 68mm D |
| Material | Aluminum |
| Maximum Load | 5kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 960g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 200µm|200µm|10µm |
| Open-loop Travel [-30 to 150 V] | 240µm|240µm|15µm |
| Position Noise | 0.7nm|0.7nm|0.1nm |
| Stiffness | 2.8N/µm|2.8N/µm|2.8N/µm |
| Resonant Frequency | 400Hz|450Hz|900Hz |
| Settling Time | 15ms|15ms|5ms |
| Linearity Deviation | 0.01%|0.01%|0.02% |
| Capacitance | 7.5µF|7.5µF|1.0µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |
Datasheet
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Supplier Information
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