NPXY100Z50-244 Nanopositioning Stage
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Specifications
| Parameter | Value |
|---|---|
| Footprint | 140mm W x 140mm D x 38mm H |
| Aperture | 68mm W x 68mm D |
| Material | Aluminum |
| Maximum Load | 5kg |
| Max Force (Push/Pull) | 100N/20N |
| Stage Mass | 1090g |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|50µm |
| Open-loop Travel [-30 to 150 V] | 160µm|160µm|80µm |
| Position Noise | 0.3nm|0.3nm|0.3nm |
| Stiffness | 1.6N/µm|1.6N/µm|4.7N/µm |
| Resonant Frequency | 400Hz|400Hz|550Hz |
| Settling Time | 10ms|10ms|10ms |
| Linearity Deviation | 0.01%|0.01%|0.05% |
| Capacitance | 4.8µF|4.8µF|4.8µF |
| Integrated Sensor | Capacitive |
| Cable Length | 2m |
| Controller | LC.403 |
Datasheet
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Supplier Information
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