NPXY100Z25-264 Nanopositioning Stage
The NPXY100Z25-264 is a three-dimensional nanopositioning scanner with a large through-hole, a high-speed Z-axis, a 100μm×100μm×25μm scan range and subnanometer resolution. It is suitable for optical measurement, nanofabrication, AFM, optical/magnetic storage, materials science and related applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Footprint | 140mm W x 140mm D x 35mm H |
| Aperture | 68mm W x 68mm D |
| Material | Aluminum |
| Maximum Load | 1 kg |
| Nanomotion Control | XYZ |
| Closed-loop Travel | 100µm|100µm|25µm |
| Position Noise | 0.3nm|0.3nm|0.2nm |
| Resonant Frequency | 600Hz|600Hz|750Hz |
| Settling Time | 10ms|10ms|5ms |
| Linearity Deviation | 0.02%|0.02%|0.02% |
| Controller | LC.403 |
Datasheet
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