NPXY100-126 Nanopositioning Stage

NPXY100-126 Nanopositioning Stage

Supplier
Nano-stage
Part Number
NPXY100-126
Category
Positioner
Origin
China

NPXY100-126 Is a Heavy-Load, Ultrathin XY Scanning Stage with a Large Aperture, Maximum Load 5kg, Through-Hole 68mm×68mm and Thickness Only 17mm. For Nanofabrication, Nanoimprinting, Optical Measurement, Storage Science and Materials Science.

Specification Snapshot
Cable Length
2m
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Overview

NPXY100-126 Is a Heavy-Load, Ultrathin XY Scanning Stage with a Large Aperture, Maximum Load 5kg, Through-Hole 68mm×68mm and Thickness Only 17mm. For Nanofabrication, Nanoimprinting, Optical Measurement, Storage Science and Materials Science.

Specifications

ParameterValue
Footprint140mm W x 140mm D x 17mm H
Aperture68mm W x 68 mm D
MaterialAluminum
Maximum Load5kg
Max Force (Push/Pull)100N/20N
Stage Mass550g
Nanomotion ControlXY
Closed-loop Travel100µm|100µm
Open-loop Travel (-30 to 150 V)160µm|160µm
Position Noise0.3nm|0.3nm
Stiffness3.3N/µm|3.3N/µm
Resonant Frequency850Hz|850Hz
Settling Time5ms|5ms
Linearity Deviation0.01%|0.01%
Capacitance4.8µF|4.8µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.402

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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