LFS2 Nanopositioning Stage
The LFS2 is a 2-axis nanopositioner with 100µm travel in X and Y and a 40 x 40 mm through-hole. This piezo stage can be combined with coarse-positioning microstages. A fast 20µm Z-axis is also available; see the 3-axis LFS3 model.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Range of motion | 100 µm |
| Resolution | 0.1 nm |
| Noise floor | typical:0.01 nm |
| Repeatability | 0.2 nm |
| Linearization | typical:0.02% |
| Resonant frequency XY | 400/300 |
| Stiffness | 0.5 N/µm |
| Sensor | Silicon HR Sensor |
| Size W x L x H | 100 mm × 100 mm × 30.2 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | Standard |
| Maximum load* [Horizontal use] | 1 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Datasheet
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Supplier Information
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