LFHS3 Nanopositioning Stage
LFHS3 is an ultrahigh-speed three-axis nanopositioner with 75 micrometers X/Y travel, 50 micrometers Z travel, a large 66 x 66mm aperture and resonance above 1.5kHz on each axis. It combines with coarse micropositioning stages; see our hybrid systems. Part of our high-speed product line, it has high-power controllers available. These enable fast scanning and response times below 2 milliseconds.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Range of motion [Z Specifications；source column LFHS3.xx.25] | 25 µm |
| Resolution [Z Specifications；source column LFHS3.xx.25] | 0.025 nm |
| Noise floor [Z Specifications；source column LFHS3.xx.25] | typical:0.0025 nm |
| Repeatability [Z Specifications；source column LFHS3.xx.25] | 0.005 nm |
| Linearization [Z Specifications；source column LFHS3.xx.25] | typical:0.02% |
| Resonant frequency [Z Specifications；source column LFHS3.xx.25] | 1500 Hz |
| Stiffness [Z Specifications；source column LFHS3.xx.25] | 3 N/µm |
| Range of motion [Z Specifications；source column LFHS3.xx.50] | 50 µm |
| Resolution [Z Specifications；source column LFHS3.xx.50] | 0.05 nm |
| Noise floor [Z Specifications；source column LFHS3.xx.50] | typical:0.005 nm |
| Repeatability [Z Specifications；source column LFHS3.xx.50] | 0.1 nm |
| Linearization [Z Specifications；source column LFHS3.xx.50] | typical:0.02% |
| Resonant frequency [Z Specifications；source column LFHS3.xx.50] | 1500 Hz |
| Stiffness [Z Specifications；source column LFHS3.xx.50] | 3 N/µm |
| Range of motion [XY Specifications；source column LFHS3.30.xx] | 30 µm |
| Resolution [XY Specifications；source column LFHS3.30.xx] | 0.03 nm |
| Noise floor [XY Specifications；source column LFHS3.30.xx] | typical:0.003 nm |
| Repeatability [XY Specifications；source column LFHS3.30.xx] | 0.06 nm |
| Linearization [XY Specifications；source column LFHS3.30.xx] | typical:0.02% |
| Resonant frequency XY [XY Specifications；source column LFHS3.30.xx] | 3000/2000 |
| Stiffness XYZ [XY Specifications；source column LFHS3.30.xx] | 4/3 |
| Range of motion [XY Specifications；source column LFHS3.50] | 50 µm |
| Resolution [XY Specifications；source column LFHS3.50] | 0.05 nm |
| Noise floor [XY Specifications；source column LFHS3.50] | typical:0.005 nm |
| Repeatability [XY Specifications；source column LFHS3.50] | 0.01 nm |
| Linearization [XY Specifications；source column LFHS3.50] | typical:0.02% |
| Resonant frequency XY [XY Specifications；source column LFHS3.50] | 3000/2000 |
| Stiffness XYZ [XY Specifications；source column LFHS3.50] | 4/3 |
| Range of motion [XY Specifications；source column LFHS3.75] | 75 µm |
| Resolution [XY Specifications；source column LFHS3.75] | 0.075 nm |
| Noise floor [XY Specifications；source column LFHS3.75] | typical:0.0075 nm |
| Repeatability [XY Specifications；source column LFHS3.75] | 0.15 nm |
| Linearization [XY Specifications；source column LFHS3.75] | typical:0.02% |
| Resonant frequency XY [XY Specifications；source column LFHS3.75] | 3000/2000 |
| Stiffness XYZ [XY Specifications；source column LFHS3.75] | 4/3 |
| Sensor [General specifications] | Silicon HR Sensor |
| Size W x L x H [General specifications] | 140 mm × 121 mm × 33.6 mm |
| Material [General specifications] | Aluminium |
| Cable length [General specifications] | 2 m |
| Controller [General specifications] | High Speed |
| Maximum load* [Horizontal use；General specifications] | 1 kg |
| Maximum load* [Vertical use；General specifications] | 0.5 kg |
Datasheet
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Supplier Information
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