LFHS2 Nanopositioning Stage LFHS2.75
LFHS2 is a 2-axis ultrahigh-speed nanopositioner with up to 75µm X/Y travel, a 66mm x 66mm aperture and resonance above 2kHz on both axes. Optional integrated Z travel is 50µm; see 3-axis LFHS3. Compatible with coarse microstages; see hybrid systems. Part of the high-speed line, optional high-power controllers enable fast scanning and responses below 2ms.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Range of motion | 75 µm |
| Resolution | 0.075 nm |
| Noise floor | typical:0.0075 nm |
| Repeatability | 0.15 nm |
| Linearization | typical:0.02% |
| Resonant frequency XY | 3000/2000 |
| Stiffness XY | 4/3 |
| Sensor | Silicon HR Sensor |
| Size W x L x H | 120.8 mm × 120.7 mm × 28.5 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | High Speed |
| Maximum load* [Horizontal use] | 1 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Datasheet
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Supplier Information
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