LF1 Nanopositioning Stage LF1.200
LF1 is a compact 1-axis piezo stage with a 66mm square aperture and 100μm, 200µm or 300µm travel. Recommended where a small footprint and aperture are required. LF1 can stack; see 2-axis model LF2. An integrated 50µm Z travel is also available; see 3-axis model LF3. It can combine with coarse micropositioning stages; see our hybrid systems. Square sample holders work with LF1.
Specification Snapshot
Repeatability
0.4 nm
Resonant frequency
400 Hz
Cable length
2 m
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Overview
LF1 is a compact 1-axis piezo stage with a 66mm square aperture and 100μm, 200µm or 300µm travel. Recommended where a small footprint and aperture are required. LF1 can stack; see 2-axis model LF2. An integrated 50µm Z travel is also available; see 3-axis model LF3. It can combine with coarse micropositioning stages; see our hybrid systems. Square sample holders work with LF1.
Specifications
| Parameter | Value |
|---|---|
| Range of motion | 200 µm |
| Resolution | 0.2 nm |
| Noise floor | typical:0.02 nm |
| Repeatability | 0.4 nm |
| Linearization | typical:0.02% |
| Resonant frequency | 400 Hz |
| Stiffness | 0.5 N/µm |
| Sensor | Silicon HR Sensor |
| Size W x L x H | 121 mm × 118 mm × 13.6 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | Standard |
| Maximum load* [Horizontal use] | 1 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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