FOCHS Nanopositioning Stage FOCHS.100
FOCHS.100 is a tubular piezo stage for precise microscope-objective positioning over 100µm. FOCHS.100 serves Z stacking, laser machining and autofocus, including optional automatic focus stabilization. Aluminum, steel and brass construction with sensors provides picometer stability. Replaceable brass rings fit nearly every objective to FOCHS.100. Threads: RMS,M25,M26,M27,M32.
Specification Snapshot
Repeatability
0.2 nm
Resonant frequency
1175 Hz
Cable length
2 m
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Overview
FOCHS.100 is a tubular piezo stage for precise microscope-objective positioning over 100µm. FOCHS.100 serves Z stacking, laser machining and autofocus, including optional automatic focus stabilization. Aluminum, steel and brass construction with sensors provides picometer stability. Replaceable brass rings fit nearly every objective to FOCHS.100. Threads: RMS,M25,M26,M27,M32.
Specifications
| Parameter | Value |
|---|---|
| Range of motion | 100 µm |
| Resolution | 0.1 nm |
| Noise floor | typical:0.01 nm |
| Repeatability | 0.2 nm |
| Linearization | typical:0.02% |
| Resonant frequency | 1175 Hz |
| Stiffness | 3.5 N/µm |
| Sensor | Silicon HR Sensor |
| Size diameter x H | Ø 65.5 mm × 50.3 mm |
| Material | Aluminium |
| Cable length | 2 m |
| Controller | High Speed |
| Maximum load* [Horizontal use] | 0.5 kg |
| Maximum load* [Vertical use] | 0.5 kg |
Applications
Z-Axis Stacking, Laser Processing, Autofocus
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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