CUSTOM: CRYO HEXAPOD POSITIONING SYSTEM
The cryogenic hexapod positioning system (CHPS) is a 6-degree-of-freedom platform for cryogenic vacuum environments. Parallel kinematics create a lightweight, rigid stage with high internal resonance, making position insensitive to floor vibration. Serial coarse and fine drives provide CHPS with millimeter travel, (sub)nm resolution, high stability and dynamic positioning. Symmetry reduces thermal sensitivity. Each leg has an optical encoder for motion control.
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