CRYO POSITIONING STAGE – HIGH RESONANCE (CPSHR) CPSHR2-S
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Specifications
| Parameter | Value |
|---|---|
| Active axes | 3 |
| Type of motion | x, y, z with parasitic RxRy |
| System Range [Typical volume for positioning；parallel kinematics: indicated max values not necessarily simultaneously achievable；maxima can increase if strokes along other axes are limited] | approx. 10x10x4 |
| System scan range [4K] | approx. 10x10x1.6 |
| Parasitic angle from xy stroke | 14 mrad/mm |
| Coarse actuator | CLA2601 |
| Scanning actuator | Piezo ceramic |
| Endstops [Endstops close to, not coincident with actuator motion axis；together define system z-position with x,y=0. Uncontrolled touching of multiple endstops with x,y nonzero can jam system and require manual action] | at z -3mm and z +3mm |
| Main construction material | Phosphor Bronze (improved thermal conductivity, lower resonances) |
| 1st natural frequency | xy:0.55 / z:2.2 |
| Coarse range [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source] | ±3 mm |
| Scan range [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source；293K] | 8 µm |
| Scan range [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source；4K] | 1.6 µm |
| Coarse step size [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source；293K] | 5–25 nm |
| Coarse step size [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source；4K] | 1–5 nm |
| Scanner sensitivity [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source；293K] | 66 nm/V |
| Scanner sensitivity [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source；4K] | 13 nm/V |
| Load capacity [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source] | 200 grams |
| Operating temperature [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source] | 0.02–375 K |
| Mass [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source] | 1230 grams |
| Coarse actuator spindle pitch [Individual actuator specification, not system motion；interface drawing transformation matrix referenced by source] | 0.25 mm/turn |
| Controller/driver | CAB-230(115), CADM(2), MCM |
| Scanner module | PSM, PSMIL |
Datasheet
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Supplier Information
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