A-HEX-90.6.60.60-XXX
The hybrid serial-parallel TRIPOD structure uses linear motors and grating feedback to provide six-axis motion in three linear and three rotational directions. A large central opening accommodates an optical path. It precisely adjusts optical loads in all six axes for optical inspection, synchrotron radiation and high-precision automation.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Effective Travel [XY Axes] | ±30mm |
| Motor type [XY Axes] | Linear Motor |
| Grating resolution [XY Axes] | 4.88nm（1vpp） |
| Minimum Step Size [XY Axes] | 100nm |
| Repeatability [XY Axes] | ±0.2um |
| Maximum Speed [XY Axes] | 100mm/s |
| Positioning Accuracy [XY Axes] | ±1um |
| Effective Travel [θX/θY Axes] | ±3deg |
| Motor type [θX/θY Axes] | Linear Motor |
| Grating resolution [θX/θY Axes] | 4.88nm（1vpp） |
| Minimum Step Size [θX/θY Axes] | 0.3sec |
| Repeatability [θX/θY Axes] | ±1sec |
| Maximum Speed [θX/θY Axes] | 30deg/sec |
| Effective Travel [Z Axis] | ±30mm |
| Motor type [Z Axis] | Linear Motor |
| Grating resolution [Z Axis] | 4.88nm（1vpp） |
| Minimum Step Size [Z Axis] | 100nm |
| Repeatability [Z Axis] | ±0.3um |
| Maximum Speed [Z Axis] | 15mm/s |
| Positioning Accuracy [Z Axis] | ±1um |
| Effective Travel [θZ Axis] | ±45deg |
| Motor type [θZ Axis] | Direct-Drive Motor |
| Grating resolution [θZ Axis] | 0.04sec |
| Minimum Step Size [θZ Axis] | 0.1sec |
| Repeatability [θZ Axis] | ±1sec |
| Maximum Speed [θZ Axis] | 4rps |
| Positioning Accuracy [θZ Axis] | ±5sec |
| Maximum load [Horizontal Load] | Horizontal Load 10kg; Contact Manufacturer for Load in Vertical Use |
| Maximum Mass [Complete Unit] | Complete Unit Weight 25kg |
Datasheet
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Supplier Information
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