A-ABRX-M200

A-ABRX-M200

Supplier
Nano-stage
Category
Positioner
Origin
China

The A-ABRX-M200 series uses a direct-drive rotary motor and air bearings for frictionless operation. A circular grating encoder provides feedback for excellent table runout and rotational accuracy. It is particularly suitable for small-step or ultraprecise rotary positioning and is an excellent choice for precision optical adjustment, assembly and machining.

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Overview

The A-ABRX-M200 series uses a direct-drive rotary motor and air bearings for frictionless operation. A circular grating encoder provides feedback for excellent table runout and rotational accuracy. It is particularly suitable for small-step or ultraprecise rotary positioning and is an excellent choice for precision optical adjustment, assembly and machining.

Specifications

ParameterValue
Motor Torque0.7Nm Rated, 2.7Nm Peak
Maximum Rotational Speed1000rpm
Encoder Line Count15744line
Encoder Resolution0.41sec (Digital Output Corresponds to 0.1um, Optional 1Vpp for Higher Resolution)
Repeatability≤±1sec
Maximum Axial Load [5bar]1200N
Maximum Radial Load [5bar]350N
Maximum Axial Stiffness [5bar]480N/um
Maximum Radial Stiffness [5bar]160N/um
Maximum Axial Runout<100nm
Maximum Radial Runout<100nm
Total Air Consumption25NL/min

Applications

Tomography, Beamline Systems, Wafer Metrology, Wafer Inspection, Measurement Technology, Inspection Systems, Calibration, Scanning

Key Features

Air Bearings with 100nm Radial and Axial Runout; Direct-Drive Motor for Precise Angular Motion; Quiet, Smooth Operation with Extremely Low Noise and Very High Precision.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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