8MTL120XY - Planar XY Linear Stage
Specification Snapshot
Weight
12.5 kg
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Specifications
| Parameter | Value |
|---|---|
| Active Axes | X,Y |
| Travel range | 120 mm × 120 mm |
| Encoder Type | Optical |
| Encoder Model | Len1 |
| Encoder Resolution [on demand] | any of the range: 25 nm to 5 µm (on demand) |
| Encoder Interface | Differential RS422 |
| Internal Multiplier | YES |
| Multiplication factor [on demand] | 4-200 (on demand) |
| Encoder Grating Period | 20 µm |
| Reference Mark (Index) | YES |
| Absolute Accuracy-before calibration | ±4.00 µm |
| Absolute Accuracy-after calibration | ± 0.5 µm |
| Bi-Directional Repeatability (peak to peak) | ±0.15 µm |
| Bi-Directional Repeatability (RMS) | ±0.10 µm |
| Pitch [Paired values are given in µrad / arcsec, respectively] | ±30 / ±6.20 |
| Yaw [Paired values are given in µrad / arcsec, respectively] | ±30 / ±6.20 |
| Maximum Velocity (load 4kg) | <1000 mm/s |
| Maximum Acceleration (load 4kg) | <20000 mm/s² |
| Limits Switches Type (Safety) | Optical (Optrons) |
| Limit Switch Polarity (Safety) | Pushed is closed |
| Limit Switch Voltage | 5…24 V |
| Design Type | Linear Motor Stage; Planar Design |
| Linear Motor Model | LM3 |
| Linear Motor Design Type | Ironless BLDC motor |
| Maximum Bus Voltage | >300 VDC |
| Load Capacity (Centrally Placed) | 30 kg |
| Moving Mass X | 3.00 kg |
| Moving Mass Y | 8.50 kg |
| Guiding System | Crossed roller bearings with cage drift protection |
| Housing Material | Aluminum Alloy |
| Housing Coating (Finish) | Black Anodizing |
| Environment pressure | Normal Atmosphere |
| Operating Temperature | 20±2, °C |
| Recommended controllers | ACS Products Line or 8SMC5-USB series |
| Recommended drivers | ACS Product Line or 8SMC5-USB series |
| Recommended power supply | 2 phase / 3 phase source |
| Recommended communication interface | EtherCAT / RS232 / USB / TCP-IP |
| Cable Length [other by request] | 2 m (other by request) |
| Differential Outputs | Optionally available by request |
| Dimensions of Moving Platform [W x L] | 240 x 240 mm (W x L) |
| Stage Dimensions [W x L x H] | 240 x 360 x 75 mm (W x L x H) |
| Measurement System | Metric/Imperial |
| Orthogonality [Paired values are given in µrad / arcsec, respectively] | 24 / 5 |
| Protection Level | Basic |
| RoHS | Compliant |
| Weight | 12.5 kg |
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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