8MTL120XY - Planar XY Linear Stage

8MTL120XY - Planar XY Linear Stage

Supplier
Nano-stage
Part Number
8MTL120XY
Category
Accessories
Origin
China
Specification Snapshot
Weight
12.5 kg
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Specifications

ParameterValue
Active AxesX,Y
Travel range120 mm × 120 mm
Encoder TypeOptical
Encoder ModelLen1
Encoder Resolution [on demand]any of the range: 25 nm to 5 µm (on demand)
Encoder InterfaceDifferential RS422
Internal MultiplierYES
Multiplication factor [on demand]4-200 (on demand)
Encoder Grating Period20 µm
Reference Mark (Index)YES
Absolute Accuracy-before calibration±4.00 µm
Absolute Accuracy-after calibration± 0.5 µm
Bi-Directional Repeatability (peak to peak)±0.15 µm
Bi-Directional Repeatability (RMS)±0.10 µm
Pitch [Paired values are given in µrad / arcsec, respectively]±30 / ±6.20
Yaw [Paired values are given in µrad / arcsec, respectively]±30 / ±6.20
Maximum Velocity (load 4kg)<1000 mm/s
Maximum Acceleration (load 4kg)<20000 mm/s²
Limits Switches Type (Safety)Optical (Optrons)
Limit Switch Polarity (Safety)Pushed is closed
Limit Switch Voltage5…24 V
Design TypeLinear Motor Stage; Planar Design
Linear Motor ModelLM3
Linear Motor Design TypeIronless BLDC motor
Maximum Bus Voltage>300 VDC
Load Capacity (Centrally Placed)30 kg
Moving Mass X3.00 kg
Moving Mass Y8.50 kg
Guiding SystemCrossed roller bearings with cage drift protection
Housing MaterialAluminum Alloy
Housing Coating (Finish)Black Anodizing
Environment pressureNormal Atmosphere
Operating Temperature20±2, °C
Recommended controllersACS Products Line or 8SMC5-USB series
Recommended driversACS Product Line or 8SMC5-USB series
Recommended power supply2 phase / 3 phase source
Recommended communication interfaceEtherCAT / RS232 / USB / TCP-IP
Cable Length [other by request]2 m (other by request)
Differential OutputsOptionally available by request
Dimensions of Moving Platform [W x L]240 x 240 mm (W x L)
Stage Dimensions [W x L x H]240 x 360 x 75 mm (W x L x H)
Measurement SystemMetric/Imperial
Orthogonality [Paired values are given in µrad / arcsec, respectively]24 / 5
Protection LevelBasic
RoHSCompliant
Weight12.5 kg

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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