A-SVMMS60-X25
(Supports vacuum compatibility at 10-5Pa.) The A-SVMMS60-X25 is an ultracompact 25mm linear stage with a highly integrated servo motor, lead screw and grating encoder transmission structure. It achieves a minimum displacement of 50nm and provides some self-locking force for Z-axis use. It can be assembled into an XYZ stage.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motor Type and Thrust | DC Motor |
| Resolution [Control Resolution] | 0.003um (Control Resolution); Optional Version with Built-In Linear Grating, 1vpp Resolution |
| Travel | 25mm |
| Lead Screw Lead [Ball Screw] | 1mm |
| Lead Screw Lead [Sliding Lead Screw] | 0.25mm |
| Unidirectional Positioning Repeatability | ≤0.15um |
| Lost Motion | ≤0.3um |
| Minimum Step Size | 50nm |
| Flatness | ≤±2um |
| Straightness | ≤±2um |
| Maximum Speed | ≥20mm/s |
| Maximum load | ≥3kg |
| Structural Component Material and Surface Finish | Hard-Anodized Aluminum Alloy |
Applications
Datasheet
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Supplier Information
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