A-Quodropod
Customizable high-vacuum 10-4Pa and ultrahigh-vacuum 10-9Pa versions. Four lift axes provide θX/θY angular adjustment and Z-axis lowering, with grating feedback and a 60KG load capacity for static leveling. A vacuum-compatible version can be customized.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Z-axis travel | ±5mm |
| Z-Axis Optical Encoder Resolution | 5nm |
| Z-Axis Positioning Repeatability | ±0.1um |
| Position Stability | ±20nm |
| Z-Axis Maximum Speed | 10mm/s |
| Z-Axis Maximum Acceleration | 2m/s |
| θX/θY Maximum Travel | ±1° |
| θ-Axis Resolution | 0.1sec |
| θ-Axis Positioning Repeatability | ±1sec |
| θ-Axis Maximum Speed | 25°/s |
| θ-Axis Maximum Acceleration | 100°/s^2 |
| Maximum load | 60kg |
Applications
Datasheet
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Supplier Information
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