GALMAR Series Ultra-High-Precision Motorized Stage GALMAR-165-U-150
Applications: GALMAR is an ultraprecision direct-drive motorized stage for laser processing, precision metrology and inspection, circuit-board manufacturing and inspection, and semiconductor manufacturing. Structure: robust mechanics, low-friction linear guides, a high-precision direct-drive motor, optimized side seals, and a rigid aerospace aluminum base with high-performance direct drive provide long life and consistent positioning. Precision: the high-performance direct-drive motor and optional optical encoder achieve submicrometer repeatability. Customization and integration: many standard features and options accommodate diverse needs, accelerate system development, and greatly reduce design effort to improve efficiency. Note: accuracy is measured 25 mm above the load table. The quoted price excludes the controller.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 150mm |
| Positioning Accuracy [Accuracy specifications measured 25mm above the load platform] | ±1μm |
| Bidirectional positioning repeatability [Accuracy specifications measured 25mm above the load platform] | ±0.5μm |
| Resolution | 10nm |
| Minimum incremental motion | 50nm |
| Straightness [Accuracy specifications measured 25mm above the load platform] | ±3μm |
| Flatness [Accuracy specifications measured 25mm above the load platform] | ±3μm |
| Pitch [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Roll [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Yaw [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Maximum Speed | 2000mm/s |
| Maximum Acceleration | 3g |
| Load Capacity | 25kg |
| Thrust | 75N |
| Stage mass | 2.5kg |
| Platform Mass | 10.1kg |
| Material | Aluminum，7075 |
| Measurement traceability | GB/T 17421.2-2016, 5 Round Trips, ≥5Plot/L |
| Mean Time Between Failures | 20000Hours |
| Ordering Model Example | GALMAR-190-U-200-E1 / GALMAR-190-U Linear Positioning Stage |
| Effective Travel - 50mm | 50mm Effective Travel |
| Effective Travel - 100mm | 100mm Effective Travel |
| Effective Travel - 150mm | 150mm Effective Travel |
| Effective Travel - 200mm | 200mm Effective Travel |
| Effective Travel - 300mm | 300mm Effective Travel |
| Effective Travel - 400mm | 400mm Effective Travel |
| Feedback Option - E1 | 1Vpp Sin/Cos Analog Output Signal &index, 20μm Grating Pitch |
| Drive motor | High-Precision Direct-Drive Motor |
| Guidance type | Low-Friction Linear Guide |
| Position feedback options [Optional] | Grating-scale closed-loop feedback |
| Dustproof Design | Side Seals Prevent Entry of Particulate Dust and Machining Debris |
| Environmental compatibility [Available] | Vacuum and Cleanroom |
Applications
Key Features
Datasheet
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Supplier Information
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