Low-hydroxyl synthetic quartz F-HIR
F-HIR is a highly preferred material for high-power lasers, DUV optical systems, lighting, measurement equipment, and KrF/ArF photomask substrates.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Total metal impurity content [F-HIR material overview (not separated by grade)] | ＜10 |
| Hydroxyl Content [F-HIR material overview (not separated by grade)] | ＜1 |
| Temperature rise [F-HIR material overview (not separated by grade); 10000W, 150S] | ＜5 |
| Internal Transmittance [F-HIR material overview (not separated by grade); 10mm; 193nm] | 99.7% |
| Internal Transmittance [F-HIR material overview (not separated by grade); 10mm; 248nm] | 99.8% |
| Internal Transmittance [F-HIR material overview (not separated by grade); 10mm; 633nm] | 99.9% |
| External transmittance [F-HIR material overview (not separated by grade); 6.35mm; 193nm] | ≥90.2% |
| Weak absorption [F-HIR material overview (not separated by grade); 1064nm] | ＜2 |
| Coefficient of Thermal Expansion [F-HIR material overview (not separated by grade); 30~200℃] | ＜6.5×10⁻⁷ |
| Radiation resistance / Transmittance change [F-HIR material overview (not separated by grade); Irradiation 100kJ/cm²] | ＜0.5 |
| Uniformity [Optical homogeneity sample; Glass aperture Φ100mm] | 0.19 ×10⁻⁶ |
| Uniformity [Optical homogeneity sample; Glass aperture Φ150mm] | 0.44 ×10⁻⁶ |
| Uniformity [Optical homogeneity sample; Glass aperture Φ200mm] | 0.51 ×10⁻⁶ |
| Uniformity [Optical homogeneity sample; Glass aperture Φ250mm] | 0.89 ×10⁻⁶ |
| Uniformity [Optical homogeneity sample; Glass aperture Φ300mm] | 1.01 ×10⁻⁶ |
| Uniformity [Optical homogeneity sample; Glass aperture Φ350mm] | 1.73 ×10⁻⁶ |
| Hydroxyl Content [F-HIR1] | ＜ 50 |
| Optical Homogeneity [F-HIR1] | ≤ 0.5 ×10⁻⁶ |
| Stress [F-HIR1] | ≤ 5 nm/cm |
| Striae [F-HIR1; Three-dimensional light-transmission directions, ISO-10110 class5] | 3D |
| Fluorescence [F-HIR1; Mercury lamp 254nm/365nm inspection] | None |
| Hydrogen Concentration [F-HIR1; Customizable] | 5×10¹⁶ ~ 5×10¹⁸ |
| Hydroxyl Content [F-HIR2] | ＜ 50 |
| Optical Homogeneity [F-HIR2] | ≤ 1 ×10⁻⁶ |
| Stress [F-HIR2] | ≤ 5 nm/cm |
| Striae [F-HIR2; Three-dimensional light-transmission directions, ISO-10110 class5] | 3D |
| Fluorescence [F-HIR2; Mercury lamp 254nm/365nm inspection] | None |
| Hydrogen Concentration [F-HIR2; Customizable] | 5×10¹⁶ ~ 5×10¹⁸ |
| Hydroxyl Content [F-HIR3] | ＜ 50 |
| Optical Homogeneity [F-HIR3] | ≤ 2 ×10⁻⁶ |
| Stress [F-HIR3] | ≤ 5 nm/cm |
| Striae [F-HIR3; Three-dimensional light-transmission directions, ISO-10110 class5] | 3D |
| Fluorescence [F-HIR3; Mercury lamp 254nm/365nm inspection] | None |
| Hydrogen Concentration [F-HIR3; Customizable] | 5×10¹⁶ ~ 5×10¹⁸ |
| Hydroxyl Content [F-HIR4] | ＜ 50 |
| Optical Homogeneity [F-HIR4] | ≤ 3 ×10⁻⁶ |
| Stress [F-HIR4] | ≤ 5 nm/cm |
| Striae [F-HIR4; Three-dimensional light-transmission directions, ISO-10110 class5] | 3D |
| Fluorescence [F-HIR4; Mercury lamp 254nm/365nm inspection] | None |
| Hydrogen Concentration [F-HIR4; Customizable] | 5×10¹⁶ ~ 5×10¹⁸ |
| Hydroxyl Content [F-HIR5] | ＜ 50 |
| Optical Homogeneity [F-HIR5] | ≤ 5 ×10⁻⁶ |
| Stress [F-HIR5] | ≤ 5 nm/cm |
| Striae [F-HIR5; Three-dimensional light-transmission directions, ISO-10110 class5] | 3D |
| Fluorescence [F-HIR5; Mercury lamp 254nm/365nm inspection] | None |
| Hydrogen Concentration [F-HIR5; Customizable] | 5×10¹⁶ ~ 5×10¹⁸ |
| Hydroxyl Content [F-HIR6] | ＜ 50 |
| Optical Homogeneity [F-HIR6] | No Requirement |
| Stress [F-HIR6] | ≤ 5 nm/cm |
| Striae [F-HIR6; Three-dimensional light-transmission directions, ISO-10110 class5] | 3D |
| Fluorescence [F-HIR6; Mercury lamp 254nm/365nm inspection] | None |
| Hydrogen Concentration [F-HIR6; Customizable] | 5×10¹⁶ ~ 5×10¹⁸ |
| Hydroxyl Content [F-HIR7] | ＜ 50 |
| Optical Homogeneity [F-HIR7] | No Requirement |
| Stress [F-HIR7] | No Requirement |
| Striae [F-HIR7; Three-dimensional light-transmission directions, ISO-10110 class5] | 3D |
| Fluorescence [F-HIR7; Mercury lamp 254nm/365nm inspection] | None |
| Hydrogen Concentration [F-HIR7; Customizable] | 5×10¹⁶ ~ 5×10¹⁸ |
| Total bubble cross-sectional area [Grade 1] | None |
| Maximum bubble diameter [Grade 1; Source does not state a unit] | None |
| Total bubble cross-sectional area [Grade 2] | ≤ 0.002 mm²/100 cm³ |
| Maximum bubble diameter [Grade 2; Source does not state a unit] | ≤ 0.03 |
| Total bubble cross-sectional area [Grade 3] | ≤ 0.01 mm²/100 cm³ |
| Maximum bubble diameter [Grade 3; Source does not state a unit] | ≤ 0.063 |
| Total bubble cross-sectional area [Grade 4] | ≤ 0.03 mm²/100 cm³ |
| Maximum bubble diameter [Grade 4; Source does not state a unit] | ≤ 0.1 |
| Refractive Index [Wavelength λ=194.17nm] | 1.559068 |
| Refractive Index n_{krf} [Wavelength λ=248.27nm] | 1.508583 |
| Refractive Index [Wavelength λ=302.15nm] | 1.487348 |
| Refractive Index [Wavelength λ=313.18nm] | 1.484501 |
| Refractive Index [Wavelength λ=351nm] | 1.476868 |
| Refractive Index n_{i} [Wavelength λ=365.01nm] | 1.474688 |
| Refractive Index n_{h} [Wavelength λ=404.65nm] | 1.469771 |
| Refractive Index n_{F'} [Wavelength λ=479.99nm] | 1.463658 |
| Refractive Index n_{d} [Wavelength λ=587.56nm] | 1.458620 |
| Refractive Index n_{D} [Wavelength λ=589.29nm] | 1.458562 |
| Refractive Index n_{He-Ne} [Wavelength λ=632.8nm] | 1.457176 |
| Refractive Index n_{c'} [Wavelength λ=643.84nm] | 1.456863 |
| Refractive Index n_{r} [Wavelength λ=706.51nm] | 1.455305 |
| Refractive Index n_{s} [Wavelength λ=852.11nm] | 1.452628 |
| Refractive Index n_{t} [Wavelength λ=1013.98nm] | 1.450411 |
| Refractive Index [Wavelength λ=1529.58nm] | 1.444438 |
Applications
Key Features
Datasheet
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