Cluster multifunctional thin-film deposition system (Cluster)
The equipment coats substrates up to 300mmX300mm. Its compact cluster layout places a transfer chamber centrally and functional coating chambers around it for easy substrate transfer. Peripheral chambers can be configured for evaporation, magnetron sputtering, plasma cleaning, or other functions to customer requirements.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Transfer chamber and transfer robot arm - Ultimate vacuum | 8E-5Pa |
| Transfer chamber and transfer robot arm - Robot sample-transfer positioning accuracy | ±0.2mm |
| Sample loading/unloading chamber (loadlock) - Ultimate vacuum | 8E-5Pa |
| Sample loading/unloading chamber (loadlock) - Cassette [Standards] | 10layers |
| Evaporation-deposition chamber - Ultimate vacuum | 4E-5Pa |
| Evaporation-deposition chamber - Substrate-stage mechanical alignment accuracy | ±0.2mm |
| Evaporation-deposition chamber - CCD alignment accuracy | ±5um |
| High-temperature evaporation-deposition chamber - Ultimate vacuum | 4E-5Pa |
| High-temperature evaporation-deposition chamber - Substrate-stage mechanical alignment accuracy | ±0.2mm |
| Rotating chamber | 90 degrees, 180 degrees and 270 degrees |
| Inverting chamber | 180degrees |
| Heating/bakeout chamber | Heating and bakeout degassing of substrates or MASK |
| Test data (film-thickness uniformity) - Target rate | 2A/S |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 1 [Target Rate: 2A/S] | 760.1 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 2 [Target Rate: 2A/S] | 777.95 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 3 [Target Rate: 2A/S] | 774.6 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 4 [Target Rate: 2A/S] | 788.4 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 5 [Target Rate: 2A/S] | 800.8 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 6 [Target Rate: 2A/S] | 799.4 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 7 [Target Rate: 2A/S] | 797.05 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 8 [Target Rate: 2A/S] | 788.7 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 9 [Target Rate: 2A/S] | 776.75 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 10 [Target Rate: 2A/S] | 762.95 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 11 [Target Rate: 2A/S] | 747.3 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 12 [Target Rate: 2A/S] | 775.95 |
| Test data (film-thickness uniformity) - Experimental data 1 - Sequence number - 13 [Target Rate: 2A/S] | 777 |
| Test data (film-thickness uniformity) - Experimental data 1 [Target Rate: 2A/S] | min:747.3; max:800.8 |
| Test data (film-thickness uniformity) - Experimental data 1 - Uniformity [Target Rate: 2A/S] | 0.03456 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 1 [Target Rate: 2A/S] | 1090.95 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 2 [Target Rate: 2A/S] | 1106.5 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 3 [Target Rate: 2A/S] | 1115.25 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 4 [Target Rate: 2A/S] | 1131.6 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 5 [Target Rate: 2A/S] | 1142.9 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 6 [Target Rate: 2A/S] | 1140.45 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 7 [Target Rate: 2A/S] | 1130.4 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 8 [Target Rate: 2A/S] | 1115.05 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 9 [Target Rate: 2A/S] | 1105.85 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 10 [Target Rate: 2A/S] | 1106.75 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 11 [Target Rate: 2A/S] | 1088.35 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 12 [Target Rate: 2A/S] | 1087.55 |
| Test data (film-thickness uniformity) - Experimental data 2 - Sequence number - 13 [Target Rate: 2A/S] | 1093 |
| Test data (film-thickness uniformity) - Experimental data 2 [Target Rate: 2A/S] | min:1087.55; max:1142.9 |
| Test data (film-thickness uniformity) - Experimental data 2 - Uniformity [Target Rate: 2A/S] | 0.02482 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 1 [Target Rate: 2A/S] | 673.8 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 2 [Target Rate: 2A/S] | 679.4 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 3 [Target Rate: 2A/S] | 688.15 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 4 [Target Rate: 2A/S] | 692 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 5 [Target Rate: 2A/S] | 697 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 6 [Target Rate: 2A/S] | 698.8 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 7 [Target Rate: 2A/S] | 694.55 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 8 [Target Rate: 2A/S] | 690.3 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 9 [Target Rate: 2A/S] | 686.7 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 10 [Target Rate: 2A/S] | 678.05 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 11 [Target Rate: 2A/S] | 669.6 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 12 [Target Rate: 2A/S] | 704.85 |
| Test data (film-thickness uniformity) - Experimental data 3 - Sequence number - 13 [Target Rate: 2A/S] | 689.7 |
| Test data (film-thickness uniformity) - Experimental data 3 [Target Rate: 2A/S] | min:669.6; max:704.85 |
| Test data (film-thickness uniformity) - Experimental data 3 - Uniformity [Target Rate: 2A/S] | 0.02565 |
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Datasheet
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