Ion Beam Sputtering Coating System (IBS)
This equipment combines a sputtering ion source, auxiliary ion source, and multiple target materials with RF ion-beam sputtering. Crystal or optical thickness monitoring controls batch production of high-precision multilayer optical components. Applications include volume production of optical-communications filters (Lan-WDM, MWDM, DWDM100G), semiconductor chips, UV coatings, and high-laser-damage-threshold coatings.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Target mechanism | Interchangeable from two to four targets |
| Target mechanism - Left/right movement | 25mm |
| Target mechanism - Target rotation accuracy | <0.1° |
| Crystal film-thickness monitoring system - Correction-plate rotation accuracy | <0.1° |
| Substrate mechanism - Workpiece rotational speed [1x12 inches (single-disc high-speed transmission structure)] | 10~1000rpm |
| Substrate mechanism - Workpiece rotational speed [4x8 inches (planetary gear transmission structure)] | 0~30rpm |
| Optical monitoring system OMS | Dual-path laser optical monitoring / white-light optical monitoring |
| Vacuum Chamber Dimensions-Diameter | 1040mm |
| Vacuum Chamber Dimensions-Height | 890mm |
| Ultimate Vacuum | Below 4.0E-5Pa |
| Gas-leak rate [Helium leak rate] | ≤5E-9Pa·m3/s (helium leak rate) |
| Gas-leak rate - Pressure holding [12 hours] | ≤5Pa |
| Vacuum recovery [Within 40 minutes; No heating] | Reaches 1.1E-3Pa within 40 minutes (without heating) |
| Main ion source | RF ion source, 16cm, three-focus converging ion beam |
| Auxiliary ion source | RF ion source, 8cm or 12cm, three-sheet diverging ion beam (literal source wording) |
| Sputtering-target system - Left/right adjustment | ±25mm |
| Sputtering-target system - Configurable | 2-4 targets |
| Sputtering-target system - Dimensions | 14cun |
| Installation site - Width | 2500 mm |
| Installation site - Depth | 3000 mm |
| Installation site - Height | 2850mm |
| Installation site - Floor load capacity [Per square meter] | More than 800 kilograms per square meter |
Datasheet
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