Magnetron Sputtering Coating System (Loadlock)

Magnetron Sputtering Coating System (Loadlock)

Supplier
Gilitek
Category
Semiconductor Manufacturing Equipment
Origin
China

This equipment develops and produces coatings for precision optical components. Sample, transfer, and process chambers with optical thickness monitoring enable precise deposition of metal, oxide, dielectric, and other films.

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Overview

This equipment develops and produces coatings for precision optical components. Sample, transfer, and process chambers with optical thickness monitoring enable precise deposition of metal, oxide, dielectric, and other films.

Specifications

ParameterValue
Ultimate pressure - Sample chamber5E-4Pa
Ultimate pressure - Transfer chamber8E-5Pa
Ultimate pressure - Process chamber8E-5Pa
Pumping speed - Sample chamber [From atmospheric pressure to 10 Pa]≤10 minutes (from atmospheric pressure to 10 Pa)
Pumping speed - Transfer chamber, process chamber [From atmospheric pressure to 5E-3 Pa]≤40 minutes (from atmospheric pressure to 5E-3 Pa)
Substrate dimensions - Single furnace12pieces
Substrate dimensions - Maximum diameter200mm
Substrate dimensions - Thickness50mm
Reaction sourceICP
Sputtering sourceSingle or dual rotating cathodes
Sputtering power supplyMedium-frequency/DC-pulsed/RF power supply
Optical-control range400-1700nm
Coating uniformity - Natural uniformity≤5%
Coating uniformity - Uniformity with a correction plate [With correction plate]≤1%
Vacuum SystemDry pump + turbomolecular pump or dry pump + cryopump
Vacuum system - Substrate-transfer failure rate≤1%
Equipment dimensions - Width6000 mm
Equipment dimensions - Depth6500 mm
Equipment dimensions - Height3500 mm

Datasheet

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Supplier Information

Gi
Gilitek
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Jelight (Suzhou) Precision Instrument Co., Ltd. was established in August 2013 and is a high-tech enterprise specializing in the research and development, production, and sales of precision thin film deposition equipment. Currently, the company has R&D centers in Milpitas, USA and Suzhou Industrial Park, Jiangsu; a 15,000-square-meter production base in Zhangjiagang, Jiangsu; and sales and after-sales service centers in Xi'an, Beijing, and other places. Adhering to the mission of "developing high-end coating technology and building a first-class coating equipment enterprise," the company is fully committed to optimizing process control and fine management, advocating the business philosophy of "honesty as the foundation, credibility as the career," and striving to forge a brilliant future for the enterprise. The company possesses world-advanced vacuum coating technology and has applied for multiple patents. Product types include ion beam sputtering coating machines (IBS), magnetron sputtering coating machines, electron beam/resistance evaporation coating machines, and multifunctional thin film deposition systems (In-Line, Cluster), etc., while also undertaking coating process consulting services and other businesses. The coating machines produced by the company not only have stable performance but also feature outstanding advantages such as multi-point synchronous precision optical monitoring systems and real-time film thickness distribution control, which can meet the equipment needs of various coating demand markets. Among them, ion sputtering coating machines and magnetron sputtering coating machines are particularly suitable for making various high-difficulty optical thin film products. The company will fully leverage its own technological advantages, always adhere to the quality philosophy of "rigorous and focused, striving for perfection," and sincerely create product value for customers. We welcome inquiries from all walks of life!

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Magnetron Sputtering Coating System (Loadlock)
Gilitek · Semiconductor Manufacturing Equipment
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