Thermal-resistance evaporation coater (research type)

Thermal-resistance evaporation coater (research type)

Supplier
Gilitek
Category
Semiconductor Manufacturing Equipment
Origin
China

An integrated design combines the main unit and control system and also permits glovebox integration.

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Overview

An integrated design combines the main unit and control system and also permits glovebox integration.

Specifications

ParameterValue
Evaporation source: boat source - Capacity1–3CC
Evaporation source: boat sourceTungsten filament + aluminum nitride/alumina.
Evaporation source: beam source - Capacity5、10CC
Evaporation source: beam sourceTantalum filament + alumina/PBN crucible; Room temperature–500 degrees
Evaporation source: beam source - Accuracy [Room temperature–500 degrees]±1degrees
Film-thickness system - Rate accuracy0.1A/S
Film-thickness system - Thickness accuracy1A
Substrate stage - Maximum loadable substrate300mm*300mm
Substrate stageRotation; Heating or water cooling (choose one).
Vacuum SystemTurbomolecular pump + mechanical pump vacuum system with bypass pumping, allowing chamber opening without stopping the main pump (cryopump optional).
Control systemPLC + PC or PLC + touchscreen automated operation; One-button evacuation and gas filling; Misoperation interlocks.
Glovebox [Optional](Optional) Connection to coating equipment for substrate loading/unloading in a water- and oxygen-free environment.
Sample chamber [Optional](Optional) Vacuum robot for substrate handling without breaking vacuum in the process chamber.
Equipment substrate dimensions [Multiple specifications available]100*100mm, 210*210mm, 300*300mm and other specifications available
Substrate uniformity [On the diagonal of 300*300mm]Better than 5%

Applications

Evaporation coating of metals at low to medium temperatures, such as silver, gold, aluminum, and indium; compounds such as LiF and SnO; and organic materials.

Datasheet

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Supplier Information

Gi
Gilitek
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Jelight (Suzhou) Precision Instrument Co., Ltd. was established in August 2013 and is a high-tech enterprise specializing in the research and development, production, and sales of precision thin film deposition equipment. Currently, the company has R&D centers in Milpitas, USA and Suzhou Industrial Park, Jiangsu; a 15,000-square-meter production base in Zhangjiagang, Jiangsu; and sales and after-sales service centers in Xi'an, Beijing, and other places. Adhering to the mission of "developing high-end coating technology and building a first-class coating equipment enterprise," the company is fully committed to optimizing process control and fine management, advocating the business philosophy of "honesty as the foundation, credibility as the career," and striving to forge a brilliant future for the enterprise. The company possesses world-advanced vacuum coating technology and has applied for multiple patents. Product types include ion beam sputtering coating machines (IBS), magnetron sputtering coating machines, electron beam/resistance evaporation coating machines, and multifunctional thin film deposition systems (In-Line, Cluster), etc., while also undertaking coating process consulting services and other businesses. The coating machines produced by the company not only have stable performance but also feature outstanding advantages such as multi-point synchronous precision optical monitoring systems and real-time film thickness distribution control, which can meet the equipment needs of various coating demand markets. Among them, ion sputtering coating machines and magnetron sputtering coating machines are particularly suitable for making various high-difficulty optical thin film products. The company will fully leverage its own technological advantages, always adhere to the quality philosophy of "rigorous and focused, striving for perfection," and sincerely create product value for customers. We welcome inquiries from all walks of life!

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Thermal-resistance evaporation coater (research type)
Gilitek · Semiconductor Manufacturing Equipment
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