Atomic layer deposition system (ALD) GA300B

Atomic layer deposition system (ALD) GA300B

Supplier
Gilitek
Part Number
GA300B
Category
Semiconductor Manufacturing Equipment
Origin
China

GA300B: High-precision functional-film preparation for VCSEL and 3D Sensing devices. Gilite: Batch deposition of DBR antireflection films and high-performance barrier films.

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Overview

GA300B: High-precision functional-film preparation for VCSEL and 3D Sensing devices. Gilite: Batch deposition of DBR antireflection films and high-performance barrier films.

Specifications

ParameterValue
Process temperature50~300 ℃
Film-thickness uniformity [Within-piece/between-piece]Within-piece/between-piece ≤2%
Coating area [Backward compatible]Supports 4/6/8/12-inch or 300×300 mm formats (backward compatible)
PrecursorDIPAS, TiCl₄, TMA, etc.
Vacuum base pressure≤1 Pa
Leak rate5.0×10⁻⁹ Pa·m³/s
Chemical-source configuration2 chemical source channels + 1 oxygen source channel (optional)
Footprint1830 mm × 1250 mm × 1400 mm
Equipment substrate dimensions [Multiple specifications available]4/6/8/12-inch, 300×300 mm and other specifications available
Equipment FunctionsALD deposition of materials such as SiO₂, TiOx and Al₂O₃

Datasheet

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Supplier Information

Gi
Gilitek
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Jelight (Suzhou) Precision Instrument Co., Ltd. was established in August 2013 and is a high-tech enterprise specializing in the research and development, production, and sales of precision thin film deposition equipment. Currently, the company has R&D centers in Milpitas, USA and Suzhou Industrial Park, Jiangsu; a 15,000-square-meter production base in Zhangjiagang, Jiangsu; and sales and after-sales service centers in Xi'an, Beijing, and other places. Adhering to the mission of "developing high-end coating technology and building a first-class coating equipment enterprise," the company is fully committed to optimizing process control and fine management, advocating the business philosophy of "honesty as the foundation, credibility as the career," and striving to forge a brilliant future for the enterprise. The company possesses world-advanced vacuum coating technology and has applied for multiple patents. Product types include ion beam sputtering coating machines (IBS), magnetron sputtering coating machines, electron beam/resistance evaporation coating machines, and multifunctional thin film deposition systems (In-Line, Cluster), etc., while also undertaking coating process consulting services and other businesses. The coating machines produced by the company not only have stable performance but also feature outstanding advantages such as multi-point synchronous precision optical monitoring systems and real-time film thickness distribution control, which can meet the equipment needs of various coating demand markets. Among them, ion sputtering coating machines and magnetron sputtering coating machines are particularly suitable for making various high-difficulty optical thin film products. The company will fully leverage its own technological advantages, always adhere to the quality philosophy of "rigorous and focused, striving for perfection," and sincerely create product value for customers. We welcome inquiries from all walks of life!

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Atomic layer deposition system (ALD) GA300B
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