Large-Scale Cathodic Arc PVD Coater
Aim to deposit various metal layers and alloyed films, or compound films by reactive coating technology on large-sized substrate products for mass production, a large-scale cathodic arc PVD coater comes into being. The large-scale cathodic arc PVD coater designed by China Guangdong PVD Metallizer Co. can be manufactured in horizontal or vertical type with chamber size more than 2 meters in diameter, 5 meters in depth. Its inner mechanism has functions of rotation, revolution and forward & backward oscillation for substrate rack to realize three dimensional motion. Equipped with pumping group of high velocity, plus magnetron sputtering cathodes coupled with cathodic arc, it is available to achieve multi-functional PVD deposition, such as single-sided deposition and all-around coating on irregularly shaped substrates with high efficiency and low production cost. The large-scale cathodic arc PVD coater can realize full automation in whole process under control of PLC “Mitsubishi” with color screen display and computerized interface and be extensively used in many industries.
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