Grid Correction Calibration Plate Series
The grid-correction calibration plate is designed to calibrate vision systems and microscope stages. It provides repeating parallel lines in the X and Y directions. Using these standard lines as references, the system's distortion and the source-described 'view' can be quantified and calibrated.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Grid plate dimensions [Grid plate dimensions 550×450mm] | 550 mm × 450 mm |
| Thickness [Grid plate dimensions 550×450mm] | 4.8 mm |
| Photomask substrate [Grid plate dimensions 550×450mm] | Quartz |
| Minimum Line Width [Grid plate dimensions 550×450mm] | 1.0 μm |
| Contact hole [Grid plate dimensions 550×450mm] | 1.5 μm × 1.5 μm |
| CD tolerance [Grid plate dimensions 550×450mm] | ±0.1 μm |
| Uniformity [Grid plate dimensions 550×450mm] | 0.12 μm |
| Overlay accuracy [Grid plate dimensions 550×450mm] | 0.12 μm |
| Defect size [Grid plate dimensions 550×450mm] | 0.8 μm |
| Defect density [Grid plate dimensions 550×450mm] | 0.6 DPSI |
| Grid plate dimensions [Grid plate dimensions 540×420mm] | 540 mm × 420 mm |
| Thickness [Grid plate dimensions 540×420mm] | 3.0 mm |
| Photomask substrate [Grid plate dimensions 540×420mm] | Soda Lime |
| Minimum Line Width [Grid plate dimensions 540×420mm] | 1.0 μm |
| Contact hole [Grid plate dimensions 540×420mm] | 1.5 μm × 1.5 μm |
| CD tolerance [Grid plate dimensions 540×420mm] | ±0.1 μm |
| Uniformity [Grid plate dimensions 540×420mm] | 0.12 μm |
| Overlay accuracy [Grid plate dimensions 540×420mm] | 0.12 μm |
| Defect size [Grid plate dimensions 540×420mm] | 0.8 μm |
| Defect density [Grid plate dimensions 540×420mm] | 0.6 DPSI |
Applications
Datasheet
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