Point Spectral Confocal Measuring Microscope System SFS-M1100
The point chromatic-confocal measuring microscope system measures height, flatness, step height, profile, and thickness, with high-speed microscope autofocus as a distinctive application. This noncontact displacement-measurement system is capable of submicrometer-level performance. It measures displacement or thickness for diffusely reflecting surfaces, mirror-reflecting surfaces, and even transparent materials. The coaxial outgoing-light and return-signal paths also make it suitable for measuring workpieces with deep or blind holes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Supported objectives | Olympus, Mitutoyo, Nikon, etc. |
| Camera sensor format | Supports up to 1 |
| Camera Interface | C Interface |
| Measurement Method [Point chromatic-confocal module] | Point chromatic-confocal measurement |
| Measurement Range [Point chromatic-confocal module; 20X objective] | 1 mm |
| Measurement Accuracy [Point chromatic-confocal module] | 1/4 of the objective depth of field |
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Datasheet
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