High Speed Long Travel Translation Stage NP-VCM-X-100A

High Speed Long Travel Translation Stage NP-VCM-X-100A

Supplier
Attomotion
Part Number
NP-VCM-X-100A
Category
Motors and Drives
Origin
China

High Speed Long Travel Translation Stage Based on Voice Coil Motor Drive and High Precision Orientation Module Positioning nanoscale super-high resolution / Scan Line Movement , Internal Grating Offset Sensor , The structure is tight. , Excellent closed-ring control through self-developed high-performance nanoserving systems , He's got nanoscale motion resolution and motion accuracy. , And it's also high speed. 、 High Dynamic Performance Positioning and Scan function 。 Support product development and development for different applications and needs Custom 。

Specification Snapshot
Sensor Type
Grating Sensor
Travel
100 mm
Resolution
1.22 nm
Repeatability
20 nm
Dimensions
160 mm × 220 mm × 82.5 mm
Operating Temperature
10-50 ℃
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Overview

High Speed Long Travel Translation Stage Based on Voice Coil Motor Drive and High Precision Orientation Module Positioning nanoscale super-high resolution / Scan Line Movement , Internal Grating Offset Sensor , The structure is tight. , Excellent closed-ring control through self-developed high-performance nanoserving systems , He's got nanoscale motion resolution and motion accuracy. , And it's also high speed. 、 High Dynamic Performance Positioning and Scan function 。 Support product development and development for different applications and needs Custom 。

Specifications

ParameterValue
AxisX
Sensor TypeGrating Sensor
Drive TypeVoice Coil Motor
Travel100 mm
Maximum Load ( Kg)1
Resolution1.22 nm
Repeatability20 nm
Dimensions160 mm × 220 mm × 82.5 mm
Operating Temperature10-50 ℃
MaterialAluminum Alloy / Titanium Alloy
Recommendations Controller / DriverNPC-032

Applications

Scan the mirror. (SEM) Sample Manipulation Active Optical Move the ultra-resolution image sample Wide-range electronic beams in a straight print (EBL) Weiner equipment and manufacture Integrated circuit manufacturing and detection High vacuum sample accuracy and alignment Nanofocus and scan Micro and nano CT

Key Features

Voice Coil Motor Proptically driven design Embedded nanoposition transfer sensor system Super-high-finger accuracy 、 High Dynamic Performance 、 Low Noise None Grid 、 Zero gaps 、 No assembly. Multimotor Mode : Positioning / Scan A long journey.

Datasheet

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Supplier Information

At
Attomotion
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Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions. The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.

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High Speed Long Travel Translation Stage NP-VCM-X-100A
Attomotion · Motors and Drives
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