High Speed Long Travel Translation Stage NP-VCM-X-100A
High Speed Long Travel Translation Stage Based on Voice Coil Motor Drive and High Precision Orientation Module Positioning nanoscale super-high resolution / Scan Line Movement , Internal Grating Offset Sensor , The structure is tight. , Excellent closed-ring control through self-developed high-performance nanoserving systems , He's got nanoscale motion resolution and motion accuracy. , And it's also high speed. 、 High Dynamic Performance Positioning and Scan function 。 Support product development and development for different applications and needs Custom 。
Specification Snapshot
Sensor Type
Grating Sensor
Travel
100 mm
Resolution
1.22 nm
Repeatability
20 nm
Dimensions
160 mm × 220 mm × 82.5 mm
Operating Temperature
10-50 ℃
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Overview
High Speed Long Travel Translation Stage Based on Voice Coil Motor Drive and High Precision Orientation Module Positioning nanoscale super-high resolution / Scan Line Movement , Internal Grating Offset Sensor , The structure is tight. , Excellent closed-ring control through self-developed high-performance nanoserving systems , He's got nanoscale motion resolution and motion accuracy. , And it's also high speed. 、 High Dynamic Performance Positioning and Scan function 。 Support product development and development for different applications and needs Custom 。
Specifications
| Parameter | Value |
|---|---|
| Axis | X |
| Sensor Type | Grating Sensor |
| Drive Type | Voice Coil Motor |
| Travel | 100 mm |
| Maximum Load ( Kg) | 1 |
| Resolution | 1.22 nm |
| Repeatability | 20 nm |
| Dimensions | 160 mm × 220 mm × 82.5 mm |
| Operating Temperature | 10-50 ℃ |
| Material | Aluminum Alloy / Titanium Alloy |
| Recommendations Controller / Driver | NPC-032 |
Applications
Scan the mirror. (SEM) Sample Manipulation Active Optical Move the ultra-resolution image sample Wide-range electronic beams in a straight print (EBL) Weiner equipment and manufacture Integrated circuit manufacturing and detection High vacuum sample accuracy and alignment Nanofocus and scan Micro and nano CT
Key Features
Voice Coil Motor Proptically driven design Embedded nanoposition transfer sensor system Super-high-finger accuracy 、 High Dynamic Performance 、 Low Noise None Grid 、 Zero gaps 、 No assembly. Multimotor Mode : Positioning / Scan A long journey.
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Supplier Information
Attomotion Technology (Shandong) Co., Ltd. is a "system-level hard technology" company integrating R&D, design, manufacturing and sales, with a fully independent intellectual property system in micro-nano measurement and control and ultra-precision automation. Serving the fields of micro-nano manufacturing, precision active optics, integrated circuit equipment and electronic information, it provides ultra-precision measurement and nano-level motion servo components as well as complete nano-automation solutions.
The company has outstanding technical strength in the fields of micro-nano measurement and ultra-precision opto-mechatronics. Its representative products include capacitive nano-displacement sensors, serialized nano-positioning/scanning stages, cross-scale stick-slip nano-stages/rotary stages, direct-drive high-speed precision workpiece stages, ultra-precision tip-tilt stages, high-performance beam steering mirrors/fast steering mirrors, high-dynamic optical/laser scanners, etc.
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