Two Dimensional High Speed Piezoelectric Tip/Tilt Mirror NP-PZT-UV-35
Two Dimensional High Speed Piezoelectric Tip/Tilt Mirror Use differential Drive Design with differential senses ， By two axes of load plane (θx,θy) The rotation moves towards a high precision pointer and a tuning. , Output twirl large , Response speed. , Control accuracy 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axis | θX，θY |
| Sensor Type | SGS |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | ±4mrad |
| Closed circle resolution | ±0.05µrad |
| Minimum Turn angle | 1µrad |
| Linearity | 0.05% |
| Resonant Frequency | 800Hz |
| Response Time | 2ms |
| Maximum Load | 300g |
| Self Weight | 0.28kg |
| Dimensions | 92.5 mm × 35 mm × 35 mm |
| Material | Aluminum Alloy / Titanium Alloy |
| Vacuum （ Optional ） | Super vacuum compatible. （5x10⁻⁹）mbar |
| Electrical Interface | D-sub9 |
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