Three Degree of Freedom Wafer Adjustment Stage NP-VCM-UVZ-10B
Voice Coil Motor Drive Three Degree of Freedom Wafer Adjustment Stage ， belong to Three Axis ACLU 。 Through three linear motion-related motion axes Z Axis linear motion and θxθy Axis rotational motion 。 It's achievable. Single Axis Straight motion 、 Two-axis linear plug-in 、 Two-axis arc plug-in 、 Complex motion like any circle 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axis | θX/θY/Z |
| Sensor Type | Grating Sensor |
| Drive Type | Voice Coil Motor |
| Z Closed cycle | ±3 mm |
| θX/θY Distortion angle | ±12.5 mrad |
| Z In Repeatability | 15 nm |
| θX/θY Repeatability | 15 μrad |
| Dimensions | Φ280 mm × 72 mm |
| Self Weight | 8 kg |
| Fix Time | ≤100 ms |
| None Loading tuned frequency | 160 Hz |
| Straight Maximum Load | 1 kg |
| Recommendations Controller / Driver | Digital Servo Controller NPC-031/ Digital Servo Controller NPC-042/ Nano. Servo Controller APS-203 |
Applications
Key Features
Datasheet
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