Multi-purpose microwave incentive magnetic-control film-plugging machine MPAS-1100
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Specifications
| Parameter | Value |
|---|---|
| Vacuum cavity | SUS304, Ø1100mm x 780mm(H) |
| Workboard Size | 152 mm(W) × 6 mm(T) × 555 mm(H) × 20 |
| Project disk rotation speed | 0rpm ~60rpm (modifiable) |
| Crystal membrane thickness meters | Two-point crystal probe + crystal thick membrane controller |
| Pressure. | ≦5.0X10-5Pa |
| Recover the vacuum. [30 minutes] | 1.3 x 10-3Pa in 30 minutes |
| Equipment Dimensions | 2200(W) x 2200mm(D) x 2150mm(H) |
| Electricity requirements | ≈50 KVA |
| The cooling of water flows required | ≧80L / min |
| Air pressure required | 0.5MPa~0.7MPa |
| Total weight [Without control cabinets] | ≈2600Kg (excluding control cabinets) |
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