Semiconductor Welding Glovebox
The system combines a dry, oxygen-free glovebox working environment, a local heated workstation and material-transfer channels so welding takes place in a tightly controlled atmosphere. An external heated chamber provides stable, programmable local heating without warming the entire glovebox. Antechambers minimize disturbance and contamination of the main atmosphere during transfers. Glove operation isolates personnel from the harmful environment while allowing direct, flexible sample handling at a compact central welding station, suited to a single process or small/medium-scale production and research. Chamber baseplate: 3.0 mm, flat at the worktable mounting position, with corresponding reinforcing ribs on the support underneath for stable worktable motion. A 15 mm-thick stainless-steel plate is welded onto the baseplate; its size is specified in the glovebox 3D drawing. Filter: high-efficiency filter with a 0.3 μm-pore screen meeting HEPA requirements. Front window: removable 10 mm safety, colorless antistatic acrylic glass, free from scratches, corrosion-resistant and well sealed; easily removable screws facilitate commissioning, with an ergonomic inclination. Rear window: removable 4 mm-thick stainless-steel plate with surrounding reinforcing strips, good sealing and easily removable screws for commissioning. External lighting: independently controlled 40 W fluorescent lamp with anti-reflection film. Ten hermetic aviation-connector interfaces, not KF-port aviation connectors, and two KF25 electrode ports are reserved at the bottom, with an additional 304 sheet-metal protective cover sized according to the 3D drawing. Six KF25 ports are installed on the two sides, with two sets of 24 V solenoid valves. Circulation gas inlet/outlet ports should be as close as possible to the chamber sides and fitted with filters. The left and right antechambers are enclosed by removable housings. The exterior is powder-coated and uses an integrated design. Space is reserved beneath the chamber, with an 800 × 600 mm length-by-height circuit-board mounting panel made of 2 mm galvanized sheet; installation space 300 mm. The operating-chamber gas circuits are interconnected except for the purification section and pneumatic doors. The purification system is beneath the glovebox and needs no additional installation space. Pneumatic vent and check valves are provided. Right antechamber: square cross-section, internal dimensions 305 mm × 305 mm × 400 mm. Vacuum ≤5 Pa with vacuum-gauge display; evacuation time <5 min from atmospheric pressure to 20 Pa using a 4L pump; vacuum pressure-rise rate <5 Pa/h. It has evacuation, refill, vent and manual vent valves, a pressure sensor covering -101 to 101 kpa and a vacuum gauge. Evacuation/refill must not disturb exposed materials. The inner door is automatic and outer door manual. A three-position, five-way valve is installed for the automatic door, with maintained-contact operation for operator safety. Door-open/closed feedback is added; the vacuum gauge need not be panel-mounted. Left heated chamber: square cross-section, internal dimensions 305 mm × 305 mm × 400 mm. Vacuum ≤5 Pa with gauge display; evacuation time <5 min from atmospheric pressure to <20 Pa; pressure-rise rate <5 Pa/h. Three aluminum heating plates provide uniform heating; each has one control and one measurement thermocouple, both type K. Heating-zone temperature uniformity ≤±5°C; after stabilization, deviation from setpoint ≤±5°C. Maximum heating temperature 200±5°C; heating from room temperature to 175°C takes ≤25 minutes. Temperature-controller display accuracy ≤±1°C. Inner and outer doors use multilayer insulation. An intelligent digital temperature controller provides coordinated automatic uniform heating and temperature holding. The exterior is wrapped in fiberglass insulation; accessible parts must not burn the hand, outer wall temperature ≤50°C, with convenient maintenance and replacement. The heated chamber has evacuation, refill, vent and manual vent valves, with 24 V stated at the manual-vent-valve entry, plus a -101 to 101 kpa pressure sensor and vacuum gauge. Evacuation/refill must not disturb exposed materials. Inner door automatic, outer door manual; the automatic door has a three-position, five-way valve and maintained-contact operation for operator safety. Door-open/closed feedback is added; the vacuum gauge need not be panel-mounted. Purging: system-controlled automatic purge valves replace the glovebox atmosphere. Oxygen analyzer: imported U.S. AVCRAY, selected according to the customer's operating environment, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Alternative: GE oxy.IQ™ Oxygen Transmitter. Moisture analyzer: imported British MICHELL, selected according to the customer's operating environment, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Alternative: GE VeriDri™ Dew-Point Transmitter. Glovebox interlock protection: an alarm is raised when humidity exceeds the preset value. Product certifications stated: ISO9001, CE and UL. Warranty: one year, with lifetime repair service. Application precautions: consult the Danger, Warning, Caution and related sections of the instruction manual.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Boxes - Dimensions | 1280mm×900mm×930mm |
| Box - Materials | 304 stainless steel |
| Box - thickness | ≥3 mm |
| Box - Volume | 1.0 m³ |
| Box - Baseboard | 3.0 mm ensures that the table is flattened and the frame under the lower floor is reinforced to ensure steady movement of the table. |
| Box - stainless steel plate welded on floor - thickness | 15 mm |
| Box - Filter | Efficient filters using 0.3 μm aperture filters that meet the HEPA criteria |
| Box - Front Window | 10 mm disassemble safe, non-colour-resistant, electrostatic, maim-free, anti-corrosive, sealable, easy to debug, screws easily disassembled, humanized angles. |
| Box - Back Window | 4mm unremovable steel plate (with four weeks of reinforced bars) with good sealability, and for the convenience of debugging equipment, screws are easily removed |
| Boxes - Lighting | 40W-day light (with anti-reflective film) in-box, independently controlled |
| Boxes - leakage rate | ≤0.05 vol%/h |
| Box-Cyclical Air Plug-in interface [Bottom] | 10 air-classified interfaces (non-kf air-port plug-ins) |
| Box - KF25 Ethic Interface [Bottom] | 2 KF25 Electro-Temporaries |
| Box-skin gold shield | One 304 sheet-metal protective cover (specific dimensions in the glovebox 3D drawing) |
| Box-KF25 interface [Both sides.] | 6 KF25 interfaces |
| Boxes - EMPs | 2 sets of electromagnetic valves (24 V) |
| Boxes - appearance | Spray |
| Boxes - circuit boards - long × high | 800× 600(mm) |
| Box - Cincinnium Plate - Thick | 2 mm |
| Boxes - Installation Space [Under the box.] | 300 mm |
| Transition class -- right transit module -- materials | 304 stainless steel |
| Transition class -- right transit class -- thickness | ≥6 mm |
| Transition class - right transit class - size | A square, internal cavity 305 mm × 305 mm × 400 mm |
| Transition class - right transit module - vacuum [Draw vacuum meters] | ≤5 Pa |
| Transition class -- right transit module -- vacuum time [Smuggle from atmospheric pressure to 20 Pa, 4L pump] | <5 min |
| Transition class -- right transit module -- vacuum rate of escalation | <5 Pa/h |
| Transition module - right transition module - pressure sensor - quantum range | -101~ 101 kpa |
| Transition module - left heating module - materials | 304 stainless steel |
| Transition module - left heating module - thickness | ≥6 mm |
| Transition module - left heating module - size | A square, internal cavity 305 mm × 305 mm × 400 mm |
| Transition module - left heating module - vacuum [Draw vacuum meters] | ≤5 Pa |
| Transition module - left heating module - vacuum time [Draw from atmospheric pressure to <20Pa] | <5 min |
| Transition module - left heating module - vacuum rate of increase | <5 Pa/h |
| Transition module - left heating module - heating mode | Heat is evenly heated with three aluminium panels, each with a thermomeat and a thermomeat (all with a K-meet) |
| Transition module - left heating module - temperature parity in heating area in the module | ≤±5 |
| Temperature of the transition module - left heating module - temperature of the heating zone in the oven is different from the temperature of the given temperature [When the temperature stabilizes] | ≤ ±5 |
| Transition module - left heating module - maximum heating temperature | 200±5 ℃ |
| Transition module - left heating module - heating time [From room temperature to 175°C] | ≤25 min |
| Transition module - left heating module - temperature control display accuracy | ≤±1 |
| Transition module - left heating module - internal and external doors - insulation | Multi-story insulation |
| Transition module - left heating module - module temperature control | Smart digital thermostat |
| Transition module - left heating module - external insulation cotton | Glass fibre insulated cotton |
| Transition module - left heating module - external wall temperature | ≤50 ℃ |
| Transition module - left heating module - manual air-jet valve | Manual air-jet valve (24V) |
| Transition module - left heating module - pressure sensor - quantum range | -101～101kpa |
| Analyzers - oxygen analysers - dimensions | 205 mm（L） x 80 mm（W） x 60 mm（H） |
| Analyzers - oxygen analysers - range measurement | 0-1000 Ppm |
| Analyzer-water analyser-size | 205 mm（L） x 80 mm（W） x 60 mm（H） |
| Analyzers - hydrometric analysers - range of measurements | 0-1000 ppm |
| Package Dimensions (W×D×H) | 2500mm×1050mm×2100mm |
| Weight | 500 KG |
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