ITO Tied Vacuum Magnetic Plugging Machine
The roll-to-roll vacuum coater achieves high vacuum and precise reciprocating web transport for PET, PI and other flexible films. A human-machine interface displays operating data and controls automatic vacuum-system preheating, pumping, cryopump operation and infrared heating. Servo drives on the main, take-up and unwinding rollers work with tension sensors for automatic constant-tension winding/unwinding. The main coating roller has a fast, efficient dedicated heater that brings its surface to process temperature to heat the substrate. A large low-temperature coil in the chamber uses an imported deep-cooling system to remove water vapor. An ion-source system modifies coatings and includes water-cooling/gas systems with high uniformity. MF twin and DC cathode systems can be configured to process requirements. The horizontal semicylindrical chamber is made entirely of304 stainless steel. One rectangular viewing window each on the front and back observes winding and coating; a round side window assists observation of unwinding and coating. The winding system comprises a substrate winding assembly and powered mobile trolley. The assembly includes unwinding equipment, main coating roller, take-up equipment, guide rollers and their large/small supporting wall plates. Servo speed control and tension sensors maintain constant tension during coating, with substrate pretensioning to prevent loose winding. Molecular pumps and domestically made oil-diffusion pumps serve as main evacuation pumps to maintain the required vacuum.
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