ZX1800 Optical Coating Machine
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Specifications
| Parameter | Value |
|---|---|
| Body size | Ф1800mm |
| Vacuum Configuration | 6XFF400+JZ1200-CE |
| Electronic guns | ZX-16MAX high power electronic gun |
| Scan system | Full programmable scan |
| Multiple control | Membrane MXC-3B |
| Crystal probe. | Inficon RSH600 with six probes |
| Vacuum measurement | Inficon VCG503 |
| Ion Support | V300-10A Hole Ion Sources |
| End vacuum [Cleaning of vacuum rooms, evaporation rooms, no samples] | 2.0X10-4Pa (vacuum cleaning, evaporation chamber without samples) |
Datasheet
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