RF-frequency ion source
The RF source uses a distinctive radio-frequency ionization technique to produce a stable plasma cloud without a hot cathode, avoiding cathode lifetime limits and enabling continuous stable operation beyond 1000+ hours. Three grids stabilize beam direction and ion-energy distribution. Combined RF ion/electron generators provide directed energy transfer from a high-energy plasma cloud in vacuum. The system operates stably with multiple working gases.
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Overview
The RF source uses a distinctive radio-frequency ionization technique to produce a stable plasma cloud without a hot cathode, avoiding cathode lifetime limits and enabling continuous stable operation beyond 1000+ hours. Three grids stabilize beam direction and ion-energy distribution. Combined RF ion/electron generators provide directed energy transfer from a high-energy plasma cloud in vacuum. The system operates stably with multiple working gases.
Specifications
| Parameter | Value |
|---|---|
| BEAM voltage [Technical description of the original parameter chart] | 100~1500 V |
| ACC voltage [Technical description of the original parameter chart] | 100~1000 V |
| Pollution rate [Technical description of the original parameter chart] | ≤1 % |
| Voltage stability [Technical description of the original parameter chart] | ±1 V |
| Electricity stabilization [Technical description of the original parameter chart] | ±0.5 % |
| Uniformity [Technical description of the original parameter chart] | ≤1 % |
| RF Power [Original combined value, not worthy of pair I/II] | 1kW and 2kW |
| Network caliber [Original combined value, not worthy of pair I/II] | 17cm and 23cm |
| Ion beam dispersability angles [Technical description of the original parameter chart] | Adjustable |
| Frequency [Original volume level/unit retention] | 13.56±2 MHz |
| Type of ion source gas [Technical description of the original parameter chart] | O₂ or Ar |
| Ion-source gas flow [O₂] | 40~100SCCM(O₂) |
| Mode of Chinese gas [Technical description of the original parameter chart] | Ar |
| Medium and treasuries [Technical description of the original parameter chart] | 5~10 SCCM |
| Capacity for availability of electronic and medium-sized equipment [Technical description of the original parameter chart] | >2 A |
| Continuous working hours [Technical description of the original parameter chart] | 1000+hours |
| Ion source home cools water flow [Technical description of the original parameter chart] | ≥3 L/min |
| Cool water pressure differential [Technical description of the original parameter chart] | ≥0.2 MPa |
Datasheet
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Supplier Information
Jiangsu Soten Vacuum Technology Co., Ltd. was spun off from the Vacuum Division of Jiangyin Zhongxing Optoelectronics Industrial Co., Ltd., wholly owned by Zhongxing Optoelectronics, established in 2021 with a registered capital of 10 million RMB, registered in Jiangyin Lingang Science and Technology Innovation Park.
Soten Vacuum is a high-tech enterprise with domestic leading level, specializing in the R&D, production, sales, and after-sales service of electron beam evaporation equipment, magnetron sputtering equipment, magnetron continuous line equipment, 5G optical communication thin film equipment, thin film catalysis equipment, etc.
The core technical team of Soten Vacuum has decades of experience in optical thin films, nano surface coating industry, and software and hardware development. Soten Vacuum has an independent product R&D and design platform with independent intellectual property rights. The company currently has 10 senior technical R&D personnel, including 6 PhD (postdoctoral) team members.
Relying on a good foundation in R&D design and advanced manufacturing, Soten Vacuum takes non-standard customization as its core competitiveness and batch production as assistance, providing customers with complete equipment solutions and cost-effective products, widely praised by customers.
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