Hall Ion Sources
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Applications
Benhor ion sources are used for the clean-up of substrate ion ion and the delivery of ion-based energy during sedimentation during vacuum plating. They are widely applied to: amplification, lens plating, fibre-optics, high-resilient mirrors, heat/cool mirrors, low-dissiplining filters, filters with filters, online cleaning, etc. They improve the growth of thin film, optimize the structure of thin membranes, increase consistency and repetition of plating, low temperature speed plating, remove surface water and hydrocarbons, increase thin membranes density, remove weakly integrated molecules, increase reaction gas activity, and make thin film compositions more manageable.
Key Features
A compact Hall-plasma ion source for ion-assisted coating, designed for easy assembly and removal. It improves adhesion, density, absorption and refractive index of high-quality optical films. JK-530N has a stated diameter of $16.2cm. Permanent magnets and pole pieces produce a large axial magnetic-field gradient; an annular Hall current accelerates ions axially into a beam. The beam has broad energy spread and divergence. A water-cooled anode lowers source and workpiece temperatures. A simple power-supply structure provides the large uniform ion-current region required for assisted deposition. One source serves ion-assisted coating in 600mm-1600mm coaters.
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Supplier Information
Chengdu Tianyi Guotai Vacuum Equipment Co., Ltd. focuses on customized vacuum application technology equipment services. Since its establishment, with a passion for vacuum technology, Tianyi Guotai Vacuum has always adhered to the development concept of "people-oriented harmony", upholding the corporate management policy of "team collaboration, sincere service, strict quality control, high quality and efficiency, and continuous improvement", actively grasping industry trends. With the purpose of "excellent quality, customer first", the company promotes the "people-oriented harmony spirit", meaning "working together, united and enterprising, win-win cooperation", and strives to provide customers with high-quality equipment and services to gain high praise and trust from customers.
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