Anode Ion Sources
The rationale is that the gas is passed between the ion's anodes, based on the linear closed drift theory of the anodes. The positive voltage of the anodes interacts with the strong magnetic field attached to internal and external incipient extremes, producing the plasma, driven by the anode field, from the ejection from the sources of the plasma. Useful uses can be used as a source of clean ion cleaning on the surface of the foundation table. The adjunct of the foundation tablets can be used directly on the soft foundation tablets, and the optical membranes, oxides, ammonia, etc., as auxiliary depositions in the magnetic-control splatter process. The properties of the aerodynamic pressure, low volt pressure, high-fence flow. The low energy from the ion of the anortic ion is driven by the an an anthropod, the low energy, the east-to-east is effective to remove organic pollutants from the surface of the foundation table and the low-teres, and the low-te-te-te-te-te-res, which are very The institutional and material composition of the anode ion source allows it to be fully adapted to the vast majority of the reaction gases, such as nitrogen, oxygen, and argon. The ion source length can be built according to user needs.
Overview
Specifications
| Parameter | Value |
|---|---|
| Effective dimensions [Quite clearly the graph type JYK-YJM; JYK-YJM] | Depending on the type. |
| Maximum empty voltage [Model: JYK-YJM] | >1500 V |
| Operating Current [Quite clearly the graph type JYK-YJM; continuous truncable; JYK-YJM] | 0-5A continuous |
| Ion Energy [Quite clearly the graph type JYK-YJM; JYK-YJM] | 50-800 eV |
| Work Pressure [Quite clearly the graph type JYK-YJM; JYK-YJM] | 1×10⁻¹~5×10⁻¹Pa |
| Air flow [Quite clearly the graph type JYK-YJM; JYK-YJM] | 0-100 Sccm |
| Cooling pipes. [∙ specify the form type JYK-YJM; table unprinted in units without mm; JYK-YJM] | Φ8×1 |
| Cold water resistance. [Quote the table type JYK-YJM; size-like, without extrapolation M; JYK-YJM] | 50 KΩ/M |
| Control Method [Quite clearly the graph type JYK-YJM; JYK-YJM] | Local/Remote |
| Scope of application [Quite clearly the graph type JYK-YJM; JYK-YJM] | Plasma cleansing and assistive plating |
Applications
Datasheet
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