Radio-Ion source 17cm.
Radiofrequency ion sources are the sources of active ion when high frequency fields are used on gaseous molecules, accelerating gaseous molecules, enabling them to reach energy-capable elevations, collisions with the atomic core in high-energy states with electrons in molecules, giving the atomic core sufficient energy to leave the atoms, which are concentrated at high-frequency field acceleration wells at the export of the ion, and generate an ion flow by extracting positive ion from the ACC polar plate. The irradiated ion sources in each country are sources of lightless ion, providing long-term stability of high energy concentrations, increasing thin membranes that are dense, smooth and non-spin-resistant in high-sight environments, significantly improving light-lit lens percetitude, homogenous, and so forth, are very suitable for complex fine-sense thin film preparation, free of thermal ion, short-lived ional, and can work in multiple working environments, with long-term stabilization of more than 100 hours without continuous stabilization, in a specific environment, and very suitable for high-sight, scientific and military applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Beam current. | 150~1500 mA |
| Beam voltage | 100~1500 V |
| Ion source radiofrequency power | 50~900 W |
| Middle Emission current | 200~3000 mA |
| Continuous no maintenance work for long periods of time | 50~100+ hours |
| Radiofrequency ion source use environment [Pure > 99.99%] | 1 oxygen line and 2 ammonia lines; purity>99.99% |
| ACC voltage [Watch out for ACC. 100 V.] | 100~1500V (ACC must be >100V) |
| Mid-to-E/B | 100~200 % |
| Medium Zero frequency power | 45~200 W |
| Ion thermal radiation temperature (>400 mm working distance) [> 400 mm work distance] | <70C |
| Electricity [380V: +5%; 3-to-5 line] | 380 V+5%, 3-to-5 line 5KW |
| Cooling water-radio frequency loops | >1 L/min |
| Cooling water - Ion source | >3 L/min |
| Cooling water - water temperature | <25C |
| Water pressure differential in and out | >0.2~0.4Mpa |
Datasheet
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