Medium cathode Ion source
The ion sources of the meso-empty cathode are widely applied: amplification, cosmetic plating, fibre-optics, high retroscopy heat/cool mirrors, online cleaning, etc. The properties of large current density, full beam current and low energy beam optimize the process of increasing and responding to performances. They are particularly suitable for industrial vacuum applications, improve the growth of thin film, optimize thin film structures, increase the consistency and repetition of plating, low temperature high-speed plating, remove surface water and hydrocarbons from work, increase thinness, reduce the internal stress, remove weakly integrated molecules, increase reaction activity and easily control the components. They include:
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Overview
Specifications
| Parameter | Value |
|---|---|
| Anode - maximum voltage | 300 V |
| Anode - Max. Work current | 10 A |
| Launch polar - maximum voltage | 100 V |
| Launch polar - maximum working current | 13 A |
| Maintain polar - maximum voltage | 1500 V |
| Maintain polar - maximum working current | 2000 mA |
| Enter grid voltage [AC；±10%] | AC220V±10% |
| Maximum Current [AC] | AC25A |
| Ion Eject angle | 60 ° |
| The diameter of the exit vent. | 45 mm |
| Working life of the Chinese tantalum tube [Based on conditions of use] | 80-200 hours (based on conditions of use) |
| Medium-Turkner Use Gases [Pure > 99.999%] | - It's a real Ar. It's a 99.999% purity. |
| Maximum flow of cathodes [Pressure ≤0.2 MPa (recommended to be constant at 0.2 MPa)] | 50sccm, pressure≤0.2MPa (recommended constant pressure: 0.2MPa) |
| Source gas flow [Pressure≤0.2MPa] | 50sccm+50sccm, pressure≤0.2MPa |
| Vacancies in the working environment | 5*10-2Pa-5*10-3Pa |
| Cooling water pressure. [Use pure or filtered water.] | 20.3 Mpa, use pure or filter water |
| Cold water temperature | ≤20C °work. |
Applications
Datasheet
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