GTCK-1800 Magnetic Spatter Plotting Membrane Machine

GTCK-1800 Magnetic Spatter Plotting Membrane Machine

Supplier
Cdguotai
Part Number
GTCK-1800
Category
Semiconductor Manufacturing Equipment
Origin
China

The GTCK series magnetic-control plating equipment provides a single-body plating machine with excellent vacuum conditions for multiple molecule pumps and stable spatter conditions.

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Overview

The GTCK series magnetic-control plating equipment provides a single-body plating machine with excellent vacuum conditions for multiple molecule pumps and stable spatter conditions.

Specifications

ParameterValue
Vacuum chamber sizeSUS304 φ1920mmx1700mm(H)
Project rackMulti-mounted assembly structure
Size of Project Frameφ1800x1150
Baseboard Turn Speed [Variable]3r/min-30r/min (variable)
Response rate controlResponse rate control Spedfor/direct reaction
Splash sourceRotation/level cathode, medium frequency/ straight current, 2-6 pairs
Multiple controlCrystal control/time cumulative control
Ion SourceAnode Ion Source/RF-ICP
Vacuum exhaust.Mechanical pump + molecular pump/low temperature pump/+ deep cold capture pump
End vacuum2.5x10-4
Air exhaust time [Atmosphere-4.0x10-3Pa; constant temperature airborne]Atmosphere-4.0x10-3Pa/15min/Land Temperature Airborne
Base temperatureUp to 350°C
Space requirementsApproximately 5.1m (width) x5.6m (depth) x3m (height)
Power Supply Requirements [Line 3-5.]3-5 line 380v50Hz, about 80kw
Cooling water demands160L/min、0.2-0.3MPa、10-35℃
Compressed Air0.6 MPa
Equipment WeightApproximately 14000kg

Key Features

Chamber size: φ1200-φ2000mm. Uses an anode-layer ion source/gridless RF ICP system. The ACS fully automatic coating control system automates the coating process. Workpiece holders use multiple hanging racks or a planetary structure. An oil-free pumping system can be customized. Film formation and process status can be observed from multiple angles.

Datasheet

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Supplier Information

Cd
Cdguotai
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Chengdu Guotai Vacuum Equipment Co., Ltd. was established in June 2013, focusing on the R&D, manufacturing and sales of vacuum coating equipment, and has built a full-chain technology system covering optical coating, magnetron sputtering, carbon film preparation, roll-to-roll coating and other fields. The company is headquartered in Chengdu, Sichuan, with branches in Dongguan, Guangdong, Fuzhou, Fujian, Shangrao, Jiangxi, and Suzhou, Jiangsu. The total production workshop area exceeds 50,000 square meters, with an annual production capacity of more than 500 sets, possessing large-scale manufacturing and nationwide service capabilities. The company adheres to deep industry-university-research integration, has a R&D center and modern production workshops, co-built a joint research center with Changchun University of Science and Technology, and co-built internship bases with Sichuan University, Xi'an Technological University and other universities, forming an innovative development ecosystem of "R&D-pilot-industrialization". The company has successively obtained qualifications such as National High-tech Enterprise, Sichuan Province Specialized and Sophisticated Enterprise, Sichuan Province Enterprise Technology Center, Chengdu New Economy Top 100 Enterprise, Gazelle Enterprise, etc. Related products have been awarded the first set (set) of major technical equipment in Sichuan Province, science and technology achievement evaluation certificate, and selected as one of the top ten brands in the vacuum coating machine industry. At the end of 2025, Chengdu Guotai Vacuum joined the Northern Huachuang Group, relying on industrial platform resources to continuously promote technological upgrading and market service capabilities. Meeting customer needs as the company's honor The company's strong complete equipment design, processing and supporting capabilities, after years of rapid and stable development, has become a leading domestic professional enterprise integrating vacuum equipment R&D, production, marketing and service. The company currently has 5 production plants, located in Chengdu, Sichuan, Dongguan, Guangdong, and Fuzhou, Fujian. In 2024, a new "Vacuum Coating Equipment R&D and Production Base" was built, with a plant area of more than 40 acres. The total production site area has been expanded to 50,000 square meters. The company is equipped with various precision testing equipment such as PerkinElmer Spectrum Two infrared spectrometer, reflectance spectrometer, mass spectrometer, Agilent Cary7000, etc. The company adheres to technology development as the center and talent strategy as the foundation; deeply cooperates with major universities, successively introduces experienced industry experts, and builds a highly educated and high-quality R&D team. The team is composed of top talents in R&D, production, process, electrical, marketing, management, after-sales and other fields, with rich experience in vacuum product production management.

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GTCK-1800 Magnetic Spatter Plotting Membrane Machine
Cdguotai · Semiconductor Manufacturing Equipment
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