GTH-1600 Infrared Optical Plating Membrane
GTH series of infrared optical vacuum plating equipment is applied to membranes in Ge, Si, ZnSe, ZnS, various types of sulfur glass, etc. These include: permersible film, filter, spectrometer, protective film, etc.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Vacuum chamber size | SUS304 φ1600mmx1800mm（H） |
| Worksheet Valid Emblem Size | φ1480 |
| Baseboard Turn Speed [Variable] | 3r/min-30r/min (variable) |
| Crystal permumle thicker | XTC-3/MXC-3+6/16 Point-Clindraction |
| evaporation source 1 | 6/8/12-bit rotation resistance, 3-bit independent resistance |
| evaporation source 2 | Type E electronic gun 1 set |
| Ion Source | GTHC-8 |
| Vacuum exhaust. | Mechanical pump + molecular pump/low temperature pump/+ deep cold capture pump |
| End vacuum | 8.0x10-5 |
| Air exhaust time [Atmosphere - 3.0 x 10-3Pa; constant temperature airborne] | Atmosphere - 3.0x10-3Pa/15min/Land Temperature Airborne |
| Base temperature [Halogen lamps/porcelain plate heating] | Heated up to 250°C, halogen lamps/polythecous plate |
| Space requirements | Approximately 2.4m (width) x 3.3m (depth) x 2.3m (height) |
| Power Supply Requirements [Line 3-4.] | 3-4 line 380v50Hz, about 70kw |
| Cooling water demands | 160L/min、0.2-0.4MPa、18-25℃ |
| Compressed Air | 0.6 MPa |
| Equipment Weight | Approximately 10000kg |
Key Features
Datasheet
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